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1. WO2006098857 - TEMPERATURE COMPENSATED OSCILLATOR INCLUDING MEMS RESONATOR FOR FREQUENCY CONTROL

Publication Number WO/2006/098857
Publication Date 21.09.2006
International Application No. PCT/US2006/006473
International Filing Date 24.02.2006
IPC
H01L 41/09 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
09with electrical input and mechanical output
H03B 28/00 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
28Generation of oscillations by methods not covered by groups H03B5/-H03B27/112
H03B 5/04 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
5Generation of oscillations using amplifier with regenerative feedback from output to input
02Details
04Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
CPC
G01K 7/32
GPHYSICS
01MEASURING; TESTING
KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
7Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat
32using change of resonant frequency of a crystal
G04G 3/04
GPHYSICS
04HOROLOGY
GELECTRONIC TIME-PIECES
3Producing timing pulses
04Temperature-compensating arrangements
H03H 2009/02496
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02244of microelectro-mechanical resonators
02488Vibration modes
02496Horizontal, i.e. parallel to the substrate plane
H03H 9/02448
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02244of microelectro-mechanical resonators
02433Means for compensation or elimination of undesired effects
02448of temperature influence
H03H 9/2473
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
24Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive
2405of microelectro-mechanical resonators
2468Tuning fork resonators
2473Double-Ended Tuning Fork [DETF] resonators
Applicants
  • THE REGENTS OF THE UNIVERSITY OF CALIFORNIA [US]/[US] (AllExceptUS)
  • QUEVY, Emmanuel, P. [FR]/[US] (UsOnly)
  • HOWE, Roger, T. [US]/[US] (UsOnly)
Inventors
  • QUEVY, Emmanuel, P.
  • HOWE, Roger, T.
Agents
  • WOODWARD, Henry, K.
Priority Data
11/361,81423.02.2006US
60/660,21109.03.2005US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) TEMPERATURE COMPENSATED OSCILLATOR INCLUDING MEMS RESONATOR FOR FREQUENCY CONTROL
(FR) OSCILLATEUR A TEMPERATURE COMPENSEE COMPRENANT UN RESONATEUR MEMS DESTINE A LA COMMANDE DE FREQUENCE
Abstract
(EN)
Disclosed is an oscillator that relies on redundancy of similar resonators integrated on chip in order to fulfill the requirement of one single quartz resonator. The immediate benefit of that approach compared to quartz technology is the monolithic integration of the reference signal function, implying smaller devices as well as cost and power savings.
(FR)
L'invention concerne un oscillateur qui s'appuie sur la redondance de résonateurs similaires intégrés sur puce afin de réaliser les besoins d'un résonateur à quartz unique. Les bienfait immédiats de cette approche par rapport à la technologie du quartz réside dans l'intégration monolithique de la fonction de signal de référence, impliquant des dispositifs plus petits ainsi que des économies de coût et d'alimentation.
Also published as
EP6735935
Latest bibliographic data on file with the International Bureau