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1. WO2006098562 - OXIDIZING AGENT FOR CHEMICAL MECHANICAL POLISHING SLURRY COMPOSITION

Publication Number WO/2006/098562
Publication Date 21.09.2006
International Application No. PCT/KR2006/000811
International Filing Date 08.03.2006
Chapter 2 Demand Filed 06.09.2006
IPC
C09K 3/14 2006.01
CCHEMISTRY; METALLURGY
09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
KMATERIALS FOR APPLICATIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
3Materials not provided for elsewhere
14Anti-slip materials; Abrasives
CPC
C11D 11/0047
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
11Special methods for preparing compositions containing mixtures of detergents
0005Special cleaning and washing methods
0011characterised by the objects to be cleaned
0023"Hard" surfaces
0047Electronic devices, e.g. PCBs, semiconductors
C11D 17/003
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
17Detergent materials characterised by their shape or physical properties
0008aqueous liquid non soap compositions
003Colloidal solutions, e.g. gels; Thixotropic solutions; Pastes
C11D 7/02
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
7Compositions of detergents based essentially on non-surface-active compounds
02Inorganic compounds
Applicants
  • DONGJIN SEMICHEM CO., LTD. [KR]/[KR] (AllExceptUS)
  • PARK, Jong-dai [KR]/[KR] (UsOnly)
  • KIM, Dong-wan [KR]/[KR] (UsOnly)
Inventors
  • PARK, Jong-dai
  • KIM, Dong-wan
Agents
  • LEE, Sang-Hun
Priority Data
10-2005-002108314.03.2005KR
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) OXIDIZING AGENT FOR CHEMICAL MECHANICAL POLISHING SLURRY COMPOSITION
(FR) AGENT OXYDANT POUR COMPOSITION DE BOUE DE POLISSAGE MECANO-CHIMIQUE
Abstract
(EN)
Disclosed are an oxidizing agent useful for preparing a chemical mechanical polishing (CMP) slurry composition and a method for producing the same. The method for preparing an oxidizing agent for a CMP slurry composition comprises the steps of: preparing an aqueous iron salt solution by admixing an iron salt and cooled water of 5°C or less; and preparing a nano synthesis particle by admixing and stirring a silica salt and the aqueous iron salt solution for carrying out a reaction of the silica salt, wherein the nano synthesis particle is a colloidal silica containing iron.
(FR)
L’invention décrit un agent oxydant utile pour préparer une composition de boue de polissage mécano-chimique (CMP), ainsi qu’un procédé permettant de produire ledit agent. Le procédé de préparation d’un agent oxydant pour composition de boue de CMP comprend les étapes consistant à : préparer une solution aqueuse d’un sel de fer en mélangeant un sel de fer et de l’eau refroidie à 5 °C ou moins ; et préparer une nanoparticule de synthèse en mélangeant, sous agitation, un sel de silice et la solution de sel de fer de manière à faire réagir le sel de silice, la nanoparticule de synthèse consistant en de la silice colloïdale contenant du fer.
Also published as
EP6716261
Latest bibliographic data on file with the International Bureau