Processing

Please wait...

PATENTSCOPE will be unavailable a few hours for maintenance reason on Saturday 31.10.2020 at 7:00 AM CET
Settings

Settings

Goto Application

1. WO2006097078 - DEVICE, IN PARTICULAR, FOR MEASURING HUMIDITY, COMPRISING CORROSION-PROTECTED CONNECTIONS

Publication Number WO/2006/097078
Publication Date 21.09.2006
International Application No. PCT/DE2006/000449
International Filing Date 14.03.2006
IPC
G01N 27/00 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
G01N 27/22 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02by investigating impedance
22by investigating capacitance
H01L 21/768 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
71Manufacture of specific parts of devices defined in group H01L21/7086
768Applying interconnections to be used for carrying current between separate components within a device
H01L 23/48 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
23Details of semiconductor or other solid state devices
48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads or terminal arrangements
CPC
G01N 25/66
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25Investigating or analyzing materials by the use of thermal means
56by investigating moisture content
66by investigating dew-point
Applicants
  • CIS INSTITUT FÜR MIKROSENSORIK GMBH [DE]/[DE] (AllExceptUS)
  • STEINKE, Arndt [DE]/[DE] (UsOnly)
  • NIELAND, Sabine [DE]/[DE] (UsOnly)
  • BROKMANN, Geert [DE]/[DE] (UsOnly)
  • MARCH, Barbara [DE]/[DE] (UsOnly)
  • GÖRBING, Klaus-Peter [DE]/[DE] (UsOnly)
Inventors
  • STEINKE, Arndt
  • NIELAND, Sabine
  • BROKMANN, Geert
  • MARCH, Barbara
  • GÖRBING, Klaus-Peter
Agents
  • LIEDTKE, Klaus
Priority Data
10 2005 011 588.814.03.2005DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) VORRICHTUNG, INSBESONDERE ZUR MESSUNG DER FEUCHTE, MIT KORROSIONSGESCHÜTZEN ANSCHLÜSSEN
(EN) DEVICE, IN PARTICULAR, FOR MEASURING HUMIDITY, COMPRISING CORROSION-PROTECTED CONNECTIONS
(FR) DISPOSITIF UTILISE EN PARTICULIER POUR MESURER L'HUMIDITE, COMPRENANT DES CONNEXIONS PROTEGEES CONTRE LA CORROSION
Abstract
(DE)
Die Erfindung betrifft eine Vorrichtung zur Messung eines Parameters eines Fluids, wobei ein elektrischer Sensor (1) auf einer Oberfläche eines Substrats (2) angeordnet und mit hinter der Oberfläche des Substrats (2) angeordneten, elektrisch voneinander isolierten Leitungen (6) kontaktiert ist. Der Erfindung liegt die Aufgabe zu Grunde, eine kostengünstige und platzsparende Vorrichtung anzugeben, wobei die Anschlusskontakte nicht dem Fluid ausgesetzt sind. Die Aufgabe wird erfindungsgemäss gelöst durch eine Vorrichtung, bei welcher die Leitungen (6) durch das Substrat (2) hindurch im Wesentlichen parallel zur Normalen der Oberfläche zu Anschlusskontakten (4) führen, die von der Oberfläche beabstandet sind.
(EN)
The invention relates to a device for measuring a parameter of a fluid, wherein an electric sensor (1) is arranged on a surface of a substrate (2) and is in contact with lines (6) which are electrically insulated from each other and which are arranged behind the surface of the substrate (2). The aim of the invention is to produce an economical and compact device wherein the connection contacts are not displaced by the fluid. Said aim is achieved by the device, wherein the lines (6) are guided to the connection contacts through the substrate (2) in an essentially parallel manner in relation to the normal surface, said connection contacts being arranged at a distance from the surface.
(FR)
L'invention concerne un dispositif pour mesurer un paramètre d'un fluide, un capteur électrique (1) étant disposé à la surface d'un substrat (2) et il est en contact avec des conduites (6) isolées électriquement les unes des autres, disposées à l'arrière de la surface du substrat (2). L'objectif de l'invention est de créer un dispositif peu coûteux et économique en place, les contacts de connexion n'étant pas exposés au fluide. A cet effet, un dispositif est utilisé, dans lequel les conduites (6) sont dirigées à travers le substrat (2) de manière sensiblement parallèle par rapport à la normale de la surface des contact de connexion (4), qui sont espacés de la surface.
Also published as
Latest bibliographic data on file with the International Bureau