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1. WO2006096646 - CONTROL OF FLUID CONDITIONS IN BULK FLUID DELIVERY SYSTEMS

Publication Number WO/2006/096646
Publication Date 14.09.2006
International Application No. PCT/US2006/007928
International Filing Date 06.03.2006
IPC
B67D 7/08 2010.01
BPERFORMING OPERATIONS; TRANSPORTING
67OPENING OR CLOSING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
DDISPENSING, DELIVERING, OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
7Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
06Details or accessories
08Arrangements of devices for controlling, indicating, metering or registering quantity or price of liquid transferred
B67D 7/02 2010.01
BPERFORMING OPERATIONS; TRANSPORTING
67OPENING OR CLOSING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
DDISPENSING, DELIVERING, OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
7Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
02for transferring liquids other than fuel or lubricants
B67D 7/72 2010.01
BPERFORMING OPERATIONS; TRANSPORTING
67OPENING OR CLOSING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
DDISPENSING, DELIVERING, OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
7Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
06Details or accessories
72Devices for applying air or other gas pressure for forcing liquid to delivery point
CPC
B67D 7/0272
BPERFORMING OPERATIONS; TRANSPORTING
67OPENING, CLOSING ; OR CLEANING; BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
DDISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
7Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
02for transferring liquids other than fuel or lubricants
0238utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
0266by gas acting directly on the liquid
0272specially adapted for transferring liquids of high purity
F04F 1/02
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
FPUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED
1Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped
02using both positively and negatively pressurised fluid medium, e.g. alternating
Y10T 137/2569
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
137Fluid handling
2496Self-proportioning or correlating systems
2559Self-controlled branched flow systems
2564Plural inflows
2567Alternate or successive inflows
2569Control by depletion of source
Y10T 137/27
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
137Fluid handling
2496Self-proportioning or correlating systems
27Liquid level responsive
Y10T 137/3127
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
137Fluid handling
2931Diverse fluid containing pressure systems
3115Gas pressure storage over or displacement of liquid
3127With gas maintenance or application
Applicants
  • THE BOC GROUP, INC. [US]/[US] (AllExceptUS)
Inventors
  • GERKEN, David
Agents
  • HEY, David, A.
Priority Data
11/367,14003.03.2006US
60/659,04704.03.2005US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) CONTROL OF FLUID CONDITIONS IN BULK FLUID DELIVERY SYSTEMS
(FR) REGULATION DES CONDITIONS FLUIDIQUES DANS DES SYSTEMES D'ADMINISTRATION DE FLUIDE EN VRAC
Abstract
(EN)
An improved bulk fluid distribution for supplying process fluids to semiconductor process tools. The improved system having an alternating pressure vessel engine substantially eliminates pressure fluctuations in the bulk fluid supply line due to head losses from the changing weight of the fluid in the dispensing vessels. The system also enables flexible control of the flow conditions of the fluid in the fluid supply line.
(FR)
L'invention concerne la distribution de fluide en vrac en vue d'alimenter des fluides de traitement vers des outils de traitement à semiconducteur. Le système amélioré comporte un moteur à enceinte sous pression alternée éliminant sensiblement les fluctuations de pression dans la ligne d'alimentation de fluide en vrac du fait des pertes de charge du changement de poids du fluide dans les enceintes de distribution. Le système permet également une régulation souple des conditions d'écoulement du fluide dans la ligne d'alimentation de fluide.
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