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1. WO2006093670 - POLISHING PAD FOR USE IN POLISHING WORK PIECES

Publication Number WO/2006/093670
Publication Date 08.09.2006
International Application No. PCT/US2006/005332
International Filing Date 15.02.2006
IPC
B24B 37/04 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37Lapping machines or devices; Accessories
04designed for working plane surfaces
B24D 13/14 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
DTOOLS FOR GRINDING, BUFFING OR SHARPENING
13Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
14acting by the front face
CPC
B24B 37/26
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
37Lapping machines or devices; Accessories
11Lapping tools
20Lapping pads for working plane surfaces
26characterised by the shape of the lapping pad surface, e.g. grooved
Applicants
  • JH RHODES COMPANY, INC. [US]/[US] (AllExceptUS)
  • THOMSON, Clifford, O. [US]/[US] (UsOnly)
  • DASKIEWICH, Scott, Benjamin [US]/[US] (UsOnly)
  • HALBERG, E., Dwaine [US]/[US] (UsOnly)
Inventors
  • THOMSON, Clifford, O.
  • DASKIEWICH, Scott, Benjamin
  • HALBERG, E., Dwaine
Agents
  • PLATT, John, H.
Priority Data
11/067,45725.02.2005US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) POLISHING PAD FOR USE IN POLISHING WORK PIECES
(FR) TAMPON A POLIR UTILISABLE POUR POLIR DES PIECES A TRAVAILLER
Abstract
(EN)
A polishing/lapping pad for use in CMP and other polishing and lapping operations is presented that comprises multiple channels designed to facilitate in the manipulation of slurry into specific locations on the wafer being planarized.
(FR)
L'invention concerne un tampon à polir/roder utilisable dans des opérations de CMP et autres de polissage et de rodage, qui comprend plusieurs canaux conçus pour faciliter la manipulation de la bouillie dans des emplacements spécifiques de la plaquette soumise à planarisation.
Also published as
EP6735141
Latest bibliographic data on file with the International Bureau