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Machine translation
1. (WO2006090748) MASK ALIGNING MECHANISM FOR FILM FORMING APPARATUS, AND FILM FORMING APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/090748    International Application No.:    PCT/JP2006/303190
Publication Date: 31.08.2006 International Filing Date: 22.02.2006
IPC:
C23C 14/50 (2006.01), C23C 14/04 (2006.01), C23C 14/12 (2006.01), C23C 14/24 (2006.01), C23C 14/56 (2006.01), H01L 51/50 (2006.01), H05B 33/10 (2006.01)
Applicants: MITSUI ENGINEERING & SHIPBUILDING CO., LTD. [JP/JP]; 6-4, Tsukiji 5-chome, Chuo-ku, Tokyo 1048439 (JP) (For All Designated States Except US).
Vieetech Japan Co., Ltd. [JP/JP] (For All Designated States Except US).
CHOSHU INDUSTRY COMPANY LIMITED [JP/JP] (For All Designated States Except US).
KATAOKA, Tatsuya [JP/JP]; (For US Only).
NAGAO, Kenji [JP/JP]; (For US Only).
SAITO, Kenichi [JP/JP]; (For US Only)
Inventors: KATAOKA, Tatsuya; .
NAGAO, Kenji; .
SAITO, Kenichi;
Agent: MURAKAMI, Tomokazu; 4th floor, Tsubaki Bldg., 10-2, Nishi-Ikebukuro 5-chome, Toshima-ku, Tokyo 1710021 (JP)
Priority Data:
2005-047814 23.02.2005 JP
Title (EN) MASK ALIGNING MECHANISM FOR FILM FORMING APPARATUS, AND FILM FORMING APPARATUS
(FR) MÉCANISME D'ALIGNEMENT DE MASQUE POUR APPAREIL DE FORMATION DE FILM, ET APPAREIL DE FORMATION DE FILM
(JA) 成膜装置のマスク位置合わせ機構および成膜装置
Abstract: front page image
(EN)A mask aligning mechanism for a film forming apparatus is provided for aligning a mask (26) in the film forming apparatus by arranging a mask clamp (22) in the film forming apparatus and aligning the mask (26) with the mask clamp (22). The mask clamp (22) is provided with an extending section (22a) which extends from a side of the mask (26) corresponding to an edge section of the mask (26), and a fitting pin (22b) which is provided on the extending section (22a). On the edge section of the mask (26), a fitting hole (26c) is provided for having the fitting pin (22b) of the mask clamp (22) fit in.
(FR)L'invention concerne un mécanisme d'alignement de masque pour appareil de formation de film permettant d'aligner un masque (26) dans l'appareil de formation de film en disposant une fixation de masque (22) dans l'appareil de formation de film et en alignant le masque (26) avec la fixation de masque (22). La fixation de masque (22) est pourvue d'une section d'extension (22a) qui s'étend depuis un côté du masque (26) correspondant à une section de bord du masque (26), et d'une goupille de raccord (22b) qui est disposée sur la section d'extension (22a). Sur la section de bord du masque (26) se trouve un trou de raccord (26c) pour raccorder la goupille de raccord (22b) de la fixation de masque (22).
(JA) 成膜装置のマスク位置合わせ機構は、成膜装置内にマスククランプ22を配設し、前記マスククランプ22に前記マスク26を載せるときの成膜装置のマスク26位置合わせ機構であって、前記マスククランプ22は、前記マスク26の縁部に対応して前記マスク26の側方から延設された延設部22aと、前記延設部22aに設けられた嵌合ピン22bとを有し、前記マスク26は、その前記縁部に前記マスククランプ22の前記嵌合ピン22bと嵌め合わされる嵌合穴26cを備えた構成である。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)