WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2006090730) JOINED ARTICLE AND MEMBER FOR HOLDING WAFER AND STRUCTURE FOR MOUNTING THE SAME, AND METHOD FOR TREATING WAFER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/090730    International Application No.:    PCT/JP2006/303150
Publication Date: 31.08.2006 International Filing Date: 22.02.2006
IPC:
H01L 21/683 (2006.01), H01L 21/3065 (2006.01), H01L 21/31 (2006.01)
Applicants: KYOCERA CORPORATION [JP/JP]; 6, Takeda Tobadono-cho, Fushimi-ku, Kyoto-shi, Kyoto 6128501 (JP) (For All Designated States Except US).
NAKAMURA, Tsunehiko [JP/JP]; (JP) (For US Only).
MAEHARA, Tatsuya [JP/JP]; (JP) (For US Only)
Inventors: NAKAMURA, Tsunehiko; (JP).
MAEHARA, Tatsuya; (JP)
Agent: KAWAMIYA, Osamu; AOYAMA & PARTNERS, IMP Building, 3-7, Shiromi 1-chome, Chuo-ku, Osaka-shi, Osaka 5400001 (JP)
Priority Data:
2005-047787 23.02.2005 JP
Title (EN) JOINED ARTICLE AND MEMBER FOR HOLDING WAFER AND STRUCTURE FOR MOUNTING THE SAME, AND METHOD FOR TREATING WAFER
(FR) ARTICLE JOINT ET ÉLÉMENT DE MAINTIEN DE PLAQUETTE ET STRUCTURE DE MONTAGE IDOINE, ET PROCÉDÉ DE TRAITEMENT DE PLAQUETTE
(JA) 接合体とウェハ保持部材及びその取付構造並びにウェハの処理方法
Abstract: front page image
(EN)A joined article, which comprises a plate-shaped ceramic article (3), a ring-shaped member (9) and a cylindrical metal member (7) having one end being joined to the under surface of the above plate-shaped ceramic article (3) via a metal joint (5) and another end being joined to the above ring-shaped member (9), wherein the above cylindrical metal member (7) relieves the stress owing to the difference in the thermal expansion coefficient between the plate-shaped ceramic article (3) and the ring-shaped member (9).
(FR)L’invention concerne un article joint, comprenant un article céramique en forme de plaque (3), un élément en forme d’anneau (9) et un élément de métal cylindrique (7) dont une extrémité est jointe à la surface inférieure de l’article céramique en forme de plaque ci-dessus (3) par le biais d’un joint de métal (5) et une autre extrémité est jointe à l’élément en forme d’anneau ci-dessus (9), l’élément de métal cylindrique (7) ci-dessus soulageant la contrainte due à la différence de coefficient de dilatation thermique entre l’article céramique en forme de plaque (3) et l’élément en forme d’anneau (9).
(JA)not available
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)