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Machine translation
1. (WO2006088737) SEMICONDUCTOR CLEANING
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/088737    International Application No.:    PCT/US2006/004774
Publication Date: 24.08.2006 International Filing Date: 13.02.2006
IPC:
C11D 11/00 (2006.01)
Applicants: SMALL, Robert, J. [US/US]; (US)
Inventors: SMALL, Robert, J.; (US)
Agent: WATKINS, Seth, A.; STEPTOE & JOHNSON LLP, 1330 Connecticut Avenue, Washington, DC 20036-1795 (US)
Priority Data:
60/651,998 14.02.2005 US
60/754,605 30.12.2005 US
11/350,757 10.02.2006 US
11/350,758 10.02.2006 US
Title (EN) SEMICONDUCTOR CLEANING
(FR) NETTOYAGE D'UN SEMI-CONDUCTEUR
Abstract: front page image
(EN)A method of cleaning a substrate includes contacting a surface of a semiconductor substrate with a composition comprising an ionic liquid. Another method of cleaning a substrate includes contacting a surface of a semiconductor substrate with a composition comprising a superacid. The semiconductor substrate may be a wafer.
(FR)L'invention concerne un procédé destiné au nettoyage d'un substrat, consistant à mettre une surface d'un substrat semi-conducteur en contact avec une composition renfermant un liquide ionique. Un autre procédé de nettoyage consiste à mettre une surface d'un substrat semi-conducteur en contact avec une composition renfermant un superacide. Le substrat semi-conducteur peut être une plaquette.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)