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Pub. No.:    WO/2006/087878    International Application No.:    PCT/JP2006/300309
Publication Date: 24.08.2006 International Filing Date: 12.01.2006
H03H 9/17 (2006.01), H01L 41/09 (2006.01), H01L 41/18 (2006.01), H01L 41/187 (2006.01), H01L 41/22 (2013.01), H01L 41/331 (2013.01)
Applicants: Murata Manufacturing Co., Ltd. [JP/JP]; 10-1, Higashikotari 1-chome, Nagaokakyo-shi, Kyoto 6178555 (JP) (For All Designated States Except US).
FUJII, Hidetoshi [JP/JP]; (JP) (For US Only)
Inventors: FUJII, Hidetoshi; (JP)
Agent: YAMAMOTO, Toshinori; Room 810, Kondo Bldg., 4-12, Nishitenma 4-chome Kita-ku, Osaka-shi, Osaka 5300047 (JP)
Priority Data:
2005-043591 21.02.2005 JP
(JA) 圧電薄膜共振子
Abstract: front page image
(EN)A piezoelectric thin film resonator which can completely eliminate breakage of a piezoelectric thin film and electrode disconnection, and a method for manufacturing such piezoelectric thin film resonator are provided. A substrate (21), and a raised section including a vibrating section (27) wherein a piezoelectric thin film (26) is arranged between a pair of excitation electrodes (24, 28) are provided. On the substrate (21), at least two film-shaped supporting sections (25, 29) are provided by being partially supported. The raised section is supported by the supporting sections (25, 29) in a state where they are raised from the substrate (21) having a space layer (23) in between.
(FR)L’invention concerne un résonateur à film mince piézoélectrique capable de supprimer complètement la rupture d’un film mince piézoélectrique et une déconnexion d’électrode, et un procédé de fabrication d’un tel résonateur à film mince piézoélectrique. Le résonateur comporte un substrat (21), et une section surélevée englobant une section vibrante (27) où un film mince piézoélectrique (26) est disposé entre une paire d’électrodes d’excitation (24, 28). Le substrat (21) présente au moins deux sections supports en forme de film (25, 29) partiellement supportées. La section surélevée est supportée par les sections supports (25, 29) qui sont surélevées par rapport au substrat (21) et séparées par une couche spatiale (23).
(JA) 圧電薄膜の破壊や電極断線などを完全に無くすことが可能である、圧電薄膜共振子およびその製造方法を提供する。  基板21と、一対の励振電極24,28の間に圧電薄膜26が配置された振動部27を含む浮き部分とを備える。基板21上にその一部が支持された少なくとも2つの膜状の支持部25,29が設けられている。浮き部分が支持部25,29によって基板21から空隙層23を介して浮いた状態で支持されている。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)