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Machine translation
1. (WO2006086300) CONTROL OF PROCESS GASES IN SPECIMEN SURFACE TREATMENT SYSTEM USING PLASMA
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/086300    International Application No.:    PCT/US2006/004093
Publication Date: 17.08.2006 International Filing Date: 06.02.2006
IPC:
H01J 37/32 (2006.01), H01L 21/00 (2006.01), H01L 21/67 (2006.01)
Applicants: ROPINTASSCO HOLDINGS, L.P. [US/US]; 2160 Satellite Boulevard, Suite 200, Duluth, GA 30097 (US) (For All Designated States Except US).
HUNT, John [US/US]; (US) (For US Only).
COX, Michael [US/US]; (US) (For US Only)
Inventors: HUNT, John; (US).
COX, Michael; (US)
Agent: BEYER, James, E.; Dinsmore & Shohl LLP, One Dayton Centre - Suite 1300, One South Main Street, Dayton, OH 45402-2023 (US)
Priority Data:
11/055,024 10.02.2005 US
11/191,610 28.07.2005 US
11/192,304 28.07.2005 US
Title (EN) CONTROL OF PROCESS GASES IN SPECIMEN SURFACE TREATMENT SYSTEM USING PLASMA
(FR) CONTROLE DE GAZ DE TRAITEMENT DANS UN SYSTEME DE TRAITEMENT DE SURFACE D'ECHANTILLON
Abstract: front page image
(EN)A method of removing hydrocarbon contaminants from a surface of a specimen is provided. The method comprises the steps of: positioning a specimen within a vacuum chamber; maintaining the vacuum chamber at a suitable pressure; introducing into the vacuum chamber a process gas comprising a hydrogen precursor or a mixture of H2 and 02; and generating a plasma discharge in the vacuum chamber such that the specimen is subject to exposure to hydrogen and oxygen ions and hydrogen, oxygen, and hydroxyl radicals. Additional embodiments are described.
(FR)Procédé d'élimination de contaminants d'hydrocarbure depuis une surface d'échantillon : introduction d'échantillon dans une chambre sous vide, maintien de la chambre à une pression appropriée, injection dans la chambre d'un gaz de traitement à précurseur d'hydrogène ou mélange H2/O2, et décharge de plasma dans la chambre pour exposer l'échantillon aux ions hydrogène et oxygène et aux radicaux hydroxyle. D'autres variantes sont également décrites.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)