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Machine translation
1. (WO2006084657) VIBRATION DAMPING FOR PHOTOLITHOGRAPHIC LENS MOUNT
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/084657    International Application No.:    PCT/EP2006/001046
Publication Date: 17.08.2006 International Filing Date: 07.02.2006
IPC:
G02B 13/18 (2006.01), G03F 7/20 (2006.01), F16F 15/16 (2006.01), F16F 9/06 (2006.01), F16F 9/12 (2006.01), G02B 7/02 (2006.01)
Applicants: CARL ZEISS SMT AG [DE/DE]; Rudolf-Eber-Strasse 2, 73447 Oberkochen (DE) (For All Designated States Except US).
GEUPPERT, Bernard [DE/DE]; (DE) (For US Only).
SOELL, Leonhard [DE/DE]; (DE) (For US Only)
Inventors: GEUPPERT, Bernard; (DE).
SOELL, Leonhard; (DE)
Agent: LORENZ & KOLLEGEN; Alte Ulmer Str. 2, 89522 Heidenheim (DE)
Priority Data:
60/652,305 11.02.2005 US
Title (EN) VIBRATION DAMPING FOR PHOTOLITHOGRAPHIC LENS MOUNT
(FR) AMORTISSEMENT DE VIBRATIONS POUR MONTURE D'OBJECTIF DE PHOTOLITHOGRAPHIE
Abstract: front page image
(EN)A connection between two components supported in a mutually vibrating fashion has at least one connection element connecting the two components, and a gap located between the two components in which a medium is located. The gap has a width small enough to largely prevent a displacement of the medium inside the gap during comparatively fast relative movements between the two components .
(FR)L'invention se rapporte à une liaison entre deux composants supportés pour qu'ils puissent vibrer mutuellement, laquelle comporte au moins un élément de liaison reliant les deux composants et un espace situé entre les deux composants dans lequel est situé un milieu. L'espace présente une largeur suffisamment petite pour empêcher en grande partie tout déplacement du milieu à l'intérieur de l'espace pendant des mouvements relatifs comparativement rapides entre les deux composants.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)