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Pub. No.:    WO/2006/083363    International Application No.:    PCT/US2005/042490
Publication Date: 10.08.2006 International Filing Date: 23.11.2005
Chapter 2 Demand Filed:    23.01.2007    
C23C 14/48 (2006.01), C23C 14/14 (2006.01), C23C 16/38 (2006.01), F17C 7/04 (2006.01)
Applicants: ADVANCED TECHNOLOGY MATERIALS, INC. [US/US]; 7 Commerce Drive, Danbury, CT 06810-4169 (US) (For All Designated States Except US).
OLANDER, Karl, W. [US/US]; (US) (For US Only).
ARNO, Jose, I. [ES/US]; (US) (For US Only)
Inventors: OLANDER, Karl, W.; (US).
ARNO, Jose, I.; (US)
Agent: FUIERER, Tristan, Anne; Intellectual Property/Technology Law, P.O. Box 14329, Research Triangle Park, NC 27709 (US).
HULTQUIST, Steven, J.; Intellectual Property/Technology Law, P.O. Box 14329, Research Triangle Park, North Carolina 27709 (US)
Priority Data:
10/998,680 29.11.2004 US
Abstract: front page image
(EN)A fluid storage and dispensing system (100) comprising a vessel (126) in a liquid nitrogen bath (128) for holding a pentaborane(9)-containing fluid at subatmospheric pressure. The pentaborane may be supplied from liquid or synthesis source (124), nitrogen from valve (120), which are controlled by gas regulators (R-I & R-2). The fluid storage and dispensing system may be communicatively connected via various valves (AV-I to AV- 16 & MV-I to MV-4) to a semiconductor or liquid crystal manufacturing facility, whereby the pentaborane(9) is used as a substitute for commercially available boron hydride compounds, such as diborane. The system may include the exhaust pump (130), scrubbing means (140), and three-way valve (162) to sample the concentration of pentaborane(9) output therefrom.
(FR)L'invention concerne un système de stockage et de distribution de fluide comprenant une cuve destinée à conserver un fluide contenant du pentaborane(9) à une pression sous-atmosphérique. Ce système de stockage et de distribution de fluide peut être en communication avec une installation de fabrication de semi-conducteurs ou d'afficheurs à cristaux liquides, le pentaborane(9) étant utilisé comme composé de substitution pour des composés d'hydrure de bore commercialement disponibles tels que le diborane.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)