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1. (WO2006081477) CHEMICAL-MECHANICAL PLANARIZATION TOOL FORCE CALIBRATION METHOD AND SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/081477    International Application No.:    PCT/US2006/003057
Publication Date: 03.08.2006 International Filing Date: 27.01.2006
IPC:
B24B 51/00 (2006.01), B24B 37/04 (2012.01)
Applicants: STRASBAUGH [US/US]; 825 Buckley Road, San Luis Obispo, California 93401 (US) (For All Designated States Except US).
KALENIAN, William [US/US]; (US) (For US Only).
WALSH, Thomas, A. [US/US]; (US) (For US Only)
Inventors: KALENIAN, William; (US).
WALSH, Thomas, A.; (US)
Agent: FRECHETTE, Marc, J.; Crockett & Crockett, 24012 Calle De La Plata, Suite 400, Laguna Hills, California 92653 (US)
Priority Data:
11/046,502 28.01.2005 US
Title (EN) CHEMICAL-MECHANICAL PLANARIZATION TOOL FORCE CALIBRATION METHOD AND SYSTEM
(FR) PROCEDE ET SYSTEME D'ETALONNAGE DE LA FORCE D'OUTILS DE PLANARISATION MECANO-CHIMIQUE
Abstract: front page image
(EN)The methods and devices described below allow users of CMP tools to quickly calibrate Spindle Force, Wafer Force, and Retaining Ring Force using mechanisms, load cells, a control computer, and force equations. The control computer can test a variety of pressures in the inflatable seal or the inflatable membrane, depending on the wafer carrier configuration, to determine a unique calibration in real time for the particular wafer carrier that is being tested and used during the polishing process.
(FR)La présente invention a trait à des procédés et des dispositifs permettant l'étalonnage rapide par des utilisateurs d'outils de polissage mécano-chimique de la force de broche, de la force de plaquette et de la force d'anneau de retenue au moyens de mécanismes, de cellules de mesure, d'un ordinateur de contrôle, et d'équations de force. L'ordinateur de contrôle peut tester une variété de pressions dans le joint gonflable ou la membrane gonflable, selon la configuration de porte-plaquette, en vue de déterminer un étalonnage unique en temps réel pour le porte-plaquette en cours de test et utilisé lors du processus de polissage.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)