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1. (WO2006081211) SCRIBING TOOL AND METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/081211    International Application No.:    PCT/US2006/002355
Publication Date: 03.08.2006 International Filing Date: 23.01.2006
Chapter 2 Demand Filed:    02.08.2006    
IPC:
B26D 3/08 (2006.01)
Applicants: MICRO PROCESSING TECHNOLOGY, INC. [US/US]; Suite B, 936 Dewing Avenue, Lafayette, California 94549 (US) (For All Designated States Except US)
Inventors: LINDSEY, Paul, C., Jr.; (US)
Agent: LAMPE, Thomas, R.; Bielen, Lampe & Thoeming, Suite 1020, 1390 Willow Pass Road, Concord, California 94520 (US)
Priority Data:
11/041,841 24.01.2005 US
11/326,204 05.01.2006 US
Title (EN) SCRIBING TOOL AND METHOD
(FR) OUTIL DE TRAÇAGE ET PROCEDE
Abstract: front page image
(EN)A scribing tool 10 for use in semiconductor scribing apparatus includes a rotatable semiconductor wafer scribing wheel 30 engageable with the semiconductor wafer 14 to form a scribe line when the tool exerts pressure on the semiconductor wafer and the scribing wheel rotates. Bearings 56 are engageable with the scribing wheel sides to resist sideways deflection during the scribing operation.
(FR)Outil de traçage destiné à un dispositif de traçage pour semi-conducteurs, comprenant une roulette de traçage sur tranches de semi-conducteur qui entre dans la tranche de semi-conducteur et y forme une ligne sous l'effet de la pression exercée par l'outil et de la rotation de la roulette. Des paliers serrant les flancs de la roulette résistent aux flexions latérales pendant l'opération de traçage. L'outil de traçage est équipé d'une structure de nettoyage qui évacue les particules créées sur la tranche de semi-conducteur.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)