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Machine translation
1. (WO2006080796) CERIUM OXIDE ABRASIVE AND SLURRY CONTAINING THE SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/080796    International Application No.:    PCT/KR2006/000271
Publication Date: 03.08.2006 International Filing Date: 24.01.2006
IPC:
C09K 3/14 (2006.01)
Applicants: LG CHEM, LTD. [KR/KR]; 20, Yoido-dong, Youngdungpo-gu, Seoul 150-721 (KR) (For All Designated States Except US).
NHO, Jun-seok [KR/KR]; (KR) (For US Only).
OH, Myoung-hwan [KR/KR]; (KR) (For US Only).
KIM, Jang-Yul [KR/KR]; (KR) (For US Only).
KIM, Jong-pil [KR/KR]; (KR) (For US Only).
CHO, Seung-beom [KR/KR]; (KR) (For US Only)
Inventors: NHO, Jun-seok; (KR).
OH, Myoung-hwan; (KR).
KIM, Jang-Yul; (KR).
KIM, Jong-pil; (KR).
CHO, Seung-beom; (KR)
Agent: CHO, In-jae; Newkorea International Patent & Law Office, 11th Fl., Unik Bldg. 706-13, Yeoksam-dong, Gangnam-gu, Seoul 135-918 (KR)
Priority Data:
10-2005-0007153 26.01.2005 KR
Title (EN) CERIUM OXIDE ABRASIVE AND SLURRY CONTAINING THE SAME
(FR) ABRASIF D'OXYDE DE CERIUM ET BOUE LE CONTENANT
Abstract: front page image
(EN)Disclosed are a cerium oxide abrasive for selectively polishing various SiO2 films and SiO2-Si3N4 films; and a slurry containing the same. The cerium oxide abrasive and the polishing slurry of the present invention have a high polishing rate and are also free from microscratches in a polished surface upon polishing since polycrystalline cerium oxide having a mean crystalline particle size of 5 nm or less is synthesized by using hexagonal cerium carbonate having a hexagonal crystal structure as a raw material of cerium.
(FR)L'invention porte sur un abrasif d'oxyde de cérium permettant de polir sélectivement plusieurs films SiO2 et SiO2-Si3N4 ; et sur une boue contenant la même chose. L'abrasif d'oxyde de cérium et la boue de polissage de l'invention présentent une vitesse de polissage élevée et ne contiennent pas de micro-rayures dans une surface polie lors du polissage puisque l'oxyde de cérium polycristallin présentant une granulométrie cristalline moyenne de 5 nm ou moins est synthétisé au moyen d'un carbonate de cérium hexagonal possédant une structure de cristal hexagonale en tant que matière première de cérium.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)