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1. (WO2006080516) EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/080516    International Application No.:    PCT/JP2006/301508
Publication Date: 03.08.2006 International Filing Date: 31.01.2006
IPC:
H01L 21/027 (2006.01), G03F 7/20 (2006.01)
Applicants: NIKON CORPORATION [JP/JP]; 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 1008331 (JP) (For All Designated States Except US).
NIKON, ENGINEERING, CO., LTD. [JP/JP]; 30-4, Tsuruyacho 3-chome, Kanagawa-ku, Yokohama-shi, Kanagawa 2210835 (JP) (For All Designated States Except US).
KOHNO, Hirotaka [JP/JP]; (JP) (For US Only).
OKUYAMA, Takeshi [JP/JP]; (JP) (For US Only).
NAGASAKA, Hiroyuki [JP/JP]; (JP) (For US Only).
NAKANO, Katsushi [JP/JP]; (JP) (For US Only)
Inventors: KOHNO, Hirotaka; (JP).
OKUYAMA, Takeshi; (JP).
NAGASAKA, Hiroyuki; (JP).
NAKANO, Katsushi; (JP)
Agent: KAWAKITA, Kijuro; YKB Mike Garden, 5-4 Shinjuku 1-chome Shinjuku-ku, Tokyo 1600022 (JP)
Priority Data:
2005-023026 31.01.2005 JP
2005-044017 21.02.2005 JP
2005-211317 21.07.2005 JP
Title (EN) EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE
(FR) APPAREIL D’EXPOSITION ET METHODE DE FABRICATION DU DISPOSITIF
(JA) 露光装置及びデバイス製造方法
Abstract: front page image
(EN)Disclosed is an exposure apparatus (EX) comprising a recovery port (22) for recovering a liquid (LQ), a blow port (32) arranged on the outer side of the recovery port (22) with respect to an optical path space (K1) for blowing a gas therethrough, and an exhaust vent (42) arranged between the recovery port (22) and the blow port (32) for discharging at least a part of the gas blown in through the blow port (32). Consequently, the liquid filling the optical path space of exposure light positioned between the projection optical system and the substrate is prevented from leaking out in this exposure apparatus.
(FR)L’invention présentée porte sur un appareil d’exposition (EX) constitué d’un port de récupération (22) servant à récupérer le liquide (LQ), d’un port souffleur (32) fixé à l’extérieur du port de récupération (22) et visant à souffler du gaz à travers un parcours optique (K1), et d’un conduit d’évacuation (42) fixé entre le port de récupération (22) et le port souffleur (32) afin d’évacuer au moins une partie du gaz émis par le port souffleur(32). Ainsi, le liquide qui se trouve à l’intérieur du parcours optique de la lumière d’exposition, entre le système optique de projection et le substrat, ne s’écoule pas de l’appareil d’exposition.
(JA) 露光装置EXは、液体LQを回収する回収口22と、光路空間K1に対して回収口22の外側に設けられ、気体を吹き出す吹出口32と、回収口22と吹出口32との間に設けられ、吹出口32から吹き出された気体の少なくとも一部を排気する排気口42とを備えている。投影光学系と基板との間の露光光の光路空間に満たされた液体の漏出を防止できる露光装置を提供する。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KM, KN, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, LY, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)