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1. WO2006052549 - INTEGRATED SUB-NANOMETER-SCALE ELECTRON BEAM SYSTEMS

Publication Number WO/2006/052549
Publication Date 18.05.2006
International Application No. PCT/US2005/039501
International Filing Date 01.11.2005
IPC
G21K 1/08 2006.1
GPHYSICS
21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
1Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
08Deviation, concentration, or focusing of the beam by electric or magnetic means
CPC
B33Y 80/00
BPERFORMING OPERATIONS; TRANSPORTING
33ADDITIVE MANUFACTURING TECHNOLOGY
YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
80Products made by additive manufacturing
G21K 1/08
GPHYSICS
21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
1Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
08Deviation, concentration or focusing of the beam by electric or magnetic means
G21K 5/04
GPHYSICS
21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
5Irradiation devices
04with beam-forming means
H01J 1/304
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02Main electrodes
30Cold cathodes, e.g. field-emissive cathode
304Field-emissive cathodes
H01J 2201/30407
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2201Electrodes common to discharge tubes
30Cold cathodes
304Field emission cathodes
30403characterised by the emitter shape
30407Microengineered point emitters
H01J 2237/062
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
06Sources
061Construction
062Reducing size of gun
Applicants
  • BIOMED SOLUTIONS, LLC [US]/[US] (AllExceptUS)
Inventors
  • SCHNEIKER, Conrad, W.
Agents
  • SLIFKIN, Neal
Priority Data
10/983,56608.11.2004US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) INTEGRATED SUB-NANOMETER-SCALE ELECTRON BEAM SYSTEMS
(FR) SYSTEMES A FAISCEAUX ELECTRONIQUES SUB-NANOMETRIQUES INTEGRES
Abstract
(EN) A solid state sub-nanometer-scale electron beam emitter comprising a multi-layered structure having a nano-tip electron emitter and tunnel emission junction formed on substrate, an initial electron beam extraction electrode, a “nano-sandwich Einzel” electrode, and a topmost protective layer.
(FR) L'invention concerne un émetteur de faisceau électronique sub-nanométrique à semi-conducteurs comprenant une structure multicouche possédant un émetteur d'électrons à nanopointe et une jonction d'émission tunnel formée sur un substrat, une électrode d'extraction de faisceau électronique initial, une électrode 'nano-sandwich Einzel' et une couche protectrice supérieure.
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