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1. WO2006049120 - DYNAMIC MODE ATOMIC FORCE MICROSCOPE PROBE VIBRATION SIMULATION METHOD, PROGRAM, RECORDING MEDIUM, AND VIBRATION SIMULATOR

Publication Number WO/2006/049120
Publication Date 11.05.2006
International Application No. PCT/JP2005/019985
International Filing Date 31.10.2005
IPC
G01Q 10/00 2010.1
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
G01Q 10/06 2010.1
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
06Circuits or algorithms therefor
G01Q 40/00 2010.1
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
40Calibration, e.g. of probes
G01Q 60/24 2010.1
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
60Particular types of SPM or apparatus therefor; Essential components thereof
24AFM or apparatus therefor, e.g. AFM probes
G01Q 60/32 2010.1
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
60Particular types of SPM or apparatus therefor; Essential components thereof
24AFM or apparatus therefor, e.g. AFM probes
32AC mode
CPC
B82Y 35/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
35Methods or apparatus for measurement or analysis of nanostructures
G01Q 30/04
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
04Display or data processing devices
G01Q 60/24
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
60Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
24AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
Applicants
  • 独立行政法人科学技術振興機構 JAPAN SCIENCE AND TECHNOLOGY AGENCY [JP]/[JP] (AllExceptUS)
  • 佐々木 成朗 SASAKI, Naruo [JP]/[JP] (UsOnly)
  • 高橋 忠孝 TAKAHASHI, Tadataka [JP]/[JP] (UsOnly)
Inventors
  • 佐々木 成朗 SASAKI, Naruo
  • 高橋 忠孝 TAKAHASHI, Tadataka
Agents
  • 橋爪 健 HASHIZUME, Takeshi
Priority Data
2004-32159105.11.2004JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) DYNAMIC MODE ATOMIC FORCE MICROSCOPE PROBE VIBRATION SIMULATION METHOD, PROGRAM, RECORDING MEDIUM, AND VIBRATION SIMULATOR
(FR) PROCÉDÉ DE SIMULATION DE VIBRATIONS DE SONDE MICROSCOPIQUE À FORCE ATOMIQUE EN MODE DYNAMIQUE, PROGRAMME, SUPPORT D’ENREGISTREMENT, ET SIMULATEUR DE VIBRATIONS
(JA) 動的モード原子間力顕微鏡探針の振動シミュレーション方法、プログラム、記録媒体、振動シミュレータ
Abstract
(EN) The vibration characteristic of a dynamic AFM probe is simulated. For a given operation parameter (for example, the displacement u0 of the probe, the spring constant k of the cantilever, or the radius of curvature of the probe R1), the plate-spring cantilever to which the probe is attached is vertically moved while being mechanically resonated, and the vibration characteristic of the probe of the dynamic mode atomic force microscope (AFM) for observing the structure of the sample surface is simulated. The vibration information on the probe in the steady state at each initial position u0 (displacement u - time &tgr;) (S103, S104) is recorded, and the movement of the probe is visualized by GUI on the basis of the recorded vibration information. An essential spectroscopy obtained by the AFM, for example the ampliture a - probe initial position u0 relation or the interaction force F - probe initial position u0 relation is determined and shown on a graph according to the approach/separation of the probe (cantilever) to/from the surface.
(FR) L’invention permet de simuler la caractéristique de vibrations d’une sonde AFM dynamique. Pour un paramètre d’exploitation donné (par exemple, le déplacement u0 de la sonde, la constante élastique k du porte-à-faux ou le rayon de courbure de la sonde R1), on déplace verticalement le porte-à-faux à ressort de plaque auquel la sonde est fixée, pendant qu’il résonne mécaniquement, et l’on simule la caractéristique de vibrations de la sonde du microscope à force atomique en mode dynamique (AFM) pour observer la structure de la surface échantillon. Les informations de vibrations sur la sonde à l’état stable à chaque position initiale u0 (déplacement u - temps &tgr;) (S103, S104) sont enregistrées et le mouvement de la sonde est visualisé par GUI sur la base des informations de vibrations enregistrées. Une spectroscopie essentielle obtenue par la sonde AFM, par exemple la relation entre l’amplitude a et la position initiale de sonde u0 ou bien la relation entre la force d’interaction F et la position initiale de sonde u0 est déterminée et illustrée sur un graphique selon l’approche ou la séparation de la sonde (porte-à-faux) par rapport à la surface.
(JA)  動的AFM探針の振動特性をシミュレートする。  任意の動作パラメータ(例えば、探針の変位u0、カンチレバーのバネ定数k、探針の曲率半径R1)に対して、探針が先端に取り付けられた板バネ状のカンチレバーを機械的に共振させながら上下動させて、試料表面の構造を観察する動的モード原子間力顕微鏡(AFM)探針の振動特性をシミュレートして、探針の初期位置u0毎の定常状態の振動情報を記録し(変位u-時刻τ)(S103、S104)、記録された振動情報に基づいてGUIで探針の運動を可視化する。一方、AFMで得られる主要なスペクトロスコピー、例えば、振幅a-探針初期位置u0関係や、相互作用力F-探針初期位置u0関係を求め、探針(カンチレバー)の表面への接近および引き離し運動に対応させてグラフ化する。
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