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1. WO2006046193 - ELECTRONIC DEVICE

Publication Number WO/2006/046193
Publication Date 04.05.2006
International Application No. PCT/IB2005/053476
International Filing Date 24.10.2005
IPC
H01H 59/00 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
59Electrostatic relays; Electro-adhesion relays
CPC
H01G 5/16
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
5Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
16using variation of distance between electrodes
H01G 5/40
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
5Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
40Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
H01H 1/06
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
1Contacts
06characterised by the shape or structure of the contact-making surface, e.g. grooved
H01H 2057/006
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
57Electrostrictive relays; Piezo-electric relays
006Micromechanical piezoelectric relay
H01H 2059/0072
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
59Electrostatic relays; Electro-adhesion relays
0009making use of micromechanics
0072with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position
H01H 57/00
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
57Electrostrictive relays; Piezo-electric relays
Applicants
  • KONINKLIJKE PHILIPS ELECTRONICS N. V. [NL]/[NL] (AllExceptUS)
  • STEENEKEN, Peter, G. [NL]/[DE] (UsOnly)
  • VAN BEEK, Jozef, Thomas, Martinus [NL]/[DE] (UsOnly)
  • RIJKS, Theo [NL]/[DE] (UsOnly)
Inventors
  • STEENEKEN, Peter, G.
  • VAN BEEK, Jozef, Thomas, Martinus
  • RIJKS, Theo
Agents
  • WHITE, Andrew
Priority Data
04105341.427.10.2004EP
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) ELECTRONIC DEVICE
(FR) DISPOSITIF ELECTRONIQUE
Abstract
(EN) The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate (14). The MEMS element comprises a first electrode (101) and a second electrode (11), that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode (11) is separated from the first electrode (101) by an air gap (110) in its first position. The movable element comprises a mechanical layer (12) and an intermediate layer, in which the second electrode (11) is defined. The second electrode (11) is constituted by a plurality of sections (131, 132, 133) in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect (121, 122, 123) to the mechanical layer (12).
(FR) Cette invention concerne un dispositif électronique comprenant un élément avec systèmes micro-électromécaniques (MEMS) sur un premier côté d'un substrat (14). L'élément MEMS comporte une première électrode (101) et une seconde électrode (11), qui fait partie d'un élément mobile et qui peut se déplacer en direction et à partir de la première électrode entre une première et une seconde position. La seconde électrode (11) est séparée de la première électrode (101) par un entrefer (110) dans sa première position. L'élément mobile comprend une couche mécanique (12) et une couche intermédiaire, dans laquelle est définie la seconde électrode (11). La seconde électrode (11) est constituée dans la couche intermédiaire par plusieurs sections (131, 132, 133), qui sont chacune reliées mécaniquement par une interconnexion verticale séparée (121, 122, 123) à la couche mécanique (12).
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