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1. WO2006040654 - MICROSYSTEM AND METHOD FOR POSITIONING A SECOND ELEMENT WITH RESPECT TO A FIRST ELEMENT IN A MICROSYSTEM

Publication Number WO/2006/040654
Publication Date 20.04.2006
International Application No. PCT/IB2005/003037
International Filing Date 29.09.2005
Chapter 2 Demand Filed 11.08.2006
IPC
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
B81B 3/00 (2006.01)
CPC
B81B 3/0018
F03G 7/06
F03G 7/065
H01H 2037/008
Applicants
  • INTERNATIONAL BUSINESS MACHINES CORPORATION [US/US]; New Orchard Road Armonk, NY 10504, US (AllExceptUS)
  • DESPONT, Michel [CH/CH]; CH (UsOnly)
  • DÜRIG, Urs, T. [CH/CH]; CH (UsOnly)
  • GOTSMANN, Bernd, W. [DE/CH]; CH (UsOnly)
Inventors
  • DESPONT, Michel; CH
  • DÜRIG, Urs, T.; CH
  • GOTSMANN, Bernd, W.; CH
Agents
  • KLETT, Peter, M.; IBM Research GmbH Zurich Research Laboratory Saeumerstrasse 4 / Postfach CH-8803 Rueschlikon, CH
Priority Data
04405640.614.10.2004EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MICROSYSTEM AND METHOD FOR POSITIONING A SECOND ELEMENT WITH RESPECT TO A FIRST ELEMENT IN A MICROSYSTEM
(FR) MICROSYSTEME ET PROCEDE DE POSITIONNEMENT D'UN SECOND ELEMENT PAR RAPPORT A UN PREMIER ELEMENT DANS UN MICROSYSTEME
Abstract
(EN)
A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.
(FR)
L'invention concerne un microsystème comprenant un premier élément statique (1), un second élément non fixé et mobile (2), un dispositif d'actionnement (3) servant à engendrer une force entre les premier et second éléments (1, 2), ledit dispositif d'actionnement (3) étant conçu pour réguler une température (T1, T2) du premier (1) ou du second élément (2). Ladite invention a aussi pour objet un procédé correspondant permettant de positionner un second élément (2) par rapport au premier élément (1) dans un microsystème.
Latest bibliographic data on file with the International Bureau