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1. WO2006035894 - MEMBER FOR SUPPORTING THIN FILM COATED BOARD, CONTAINER FOR STORING THIN FILM COATED BOARD, MASK BLANK STORING BODY, TRANSFER MASK STORING BODY AND METHOD FOR TRANSPORTING THIN FILM COATED BOARD

Publication Number WO/2006/035894
Publication Date 06.04.2006
International Application No. PCT/JP2005/018001
International Filing Date 29.09.2005
IPC
H01L 21/673 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
B65D 85/86 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
85Containers, packaging elements or packages, specially adapted for particular articles or materials
86for electrical components
H01L 21/027 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
027Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
CPC
B65D 2585/86
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
2585Containers, packaging elements or packages specially adapted for particular articles or materials
68for machines, engines, or vehicles in assembled or dismantled form
86for electrical components
G03F 1/66
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
1Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
66Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
G03F 7/70741
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70691Handling of masks or wafers
70733Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
70741Handling masks outside exposure position, e.g. reticle libraries
G03F 7/70916
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
708Construction of apparatus, e.g. environment, hygiene aspects or materials
70908Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution, removing pollutants from apparatus; electromagnetic and electrostatic-charge pollution
70916Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
H01L 21/67359
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67359specially adapted for containing masks, reticles or pellicles
H01L 21/67366
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67366characterised by materials, roughness, coatings or the like
Applicants
  • HOYA株式会社 HOYA CORPORATION [JP]/[JP] (AllExceptUS)
  • 栗川 明典 KURIKAWA, Akinori [JP]/[JP] (UsOnly)
Inventors
  • 栗川 明典 KURIKAWA, Akinori
Agents
  • 大塚 武史 OTSUKA, Takefumi
Priority Data
2004-28382229.09.2004JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) MEMBER FOR SUPPORTING THIN FILM COATED BOARD, CONTAINER FOR STORING THIN FILM COATED BOARD, MASK BLANK STORING BODY, TRANSFER MASK STORING BODY AND METHOD FOR TRANSPORTING THIN FILM COATED BOARD
(FR) ÉLÉMENT SUPPORT DE CARTE REVÊTUE DE FILM MINCE, CONTENEUR DE STOCKAGE DE CARTE REVÊTUE DE FILM MINCE, CORPS DE STOCKAGE D’ÉBAUCHE DE MASQUE, CORPS DE STOCKAGE DE MASQUE DE TRANSFERT ET PROCÉDÉ DE TRANSPORT DE CARTE REVÊTUE DE FILM MINCE
(JA) 薄膜付基板の支持部材、薄膜付基板の収納容器、マスクブランク収納体、転写マスク収納体、及び薄膜付基板の輸送方法
Abstract
(EN)
A member for supporting a thin film coated board, by which dust generation due to particles and the like can be sufficiently suppressed, and a storing container, which is suitable for storing the thin film coated board, is provided with the supporting member and stores the thin film coated board while keeping the thin film coated board at a high cleanliness. The supporting members (2, 5) are provided with a supporting means for supporting the thin film coated board (1), such as a mask blank. The surface of at least a portion of the supporting means that comes into contact with the thin film coated board (1) is permitted to be a smooth plane having an arithmetic average surface roughness (Ra) of 0.1μm or less. The surface of at least the portion of the supporting means that comes into contact with the thin film coated board (1) is composed of, for instance, a resin material. In the storing container provided with the supporting member for supporting the thin film coated board (1) in a fixed status, the thin film coated board (1) is supported by using the supporting members (2, 5).
(FR)
L’invention concerne un élément support de carte revêtue de film mince, permettant de supprimer de manière suffisante la production de poussière par les particules et autres, et un conteneur de stockage, convenable pour stocker la carte revêtue de film mince, pourvu de l’élément support et stockant la carte revêtue de film mince tout en maintenant la parfaite propreté de la carte revêtue de film mince. Les éléments supports (2, 5) sont munis d’un moyen de support pour supporter la carte revêtue de film mince (1), comme une ébauche de masque. La surface d’au moins une portion du moyen de support venant au contact de la carte revêtue de film mince (1) peut être lisse avec une rugosité de surface moyenne arithmétique (Ra) inférieure ou égale à 0,1µm. La surface d’au moins une portion du moyen de support venant au contact de la carte revêtue de film mince (1) se compose, par exemple, d’un matériau de résine. Dans le conteneur de stockage muni de l’élément support pour supporter la carte revêtue de film mince (1) à l’état fixe, la carte revêtue de film mince (1) est soutenue par les éléments supports (2, 5).
(JA)
not available
Also published as
Latest bibliographic data on file with the International Bureau