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1. WO2006035609 - METHOD FOR TRACE ANALYSIS AND ANALYZER THEREFOR

Publication Number WO/2006/035609
Publication Date 06.04.2006
International Application No. PCT/JP2005/016979
International Filing Date 14.09.2005
IPC
G01N 30/14 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography
02Column chromatography
04Preparation or injection of sample to be analysed
06Preparation
14by elimination of some components
G01N 30/06 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography
02Column chromatography
04Preparation or injection of sample to be analysed
06Preparation
G01N 30/88 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography
02Column chromatography
88Integrated analysis systems specially adapted therefor, not covered by a single one of groups G01N30/04-G01N30/86146
CPC
G01N 2030/025
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography ; or field flow fractionation;
02Column chromatography
022characterised by the kind of separation mechanism
025Gas chromatography
G01N 2030/8859
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography ; or field flow fractionation;
02Column chromatography
88Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
8809analysis specially adapted for the sample
8859inorganic compounds
G01N 30/14
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography ; or field flow fractionation;
02Column chromatography
04Preparation or injection of sample to be analysed
06Preparation
14by elimination of some components
G01N 30/88
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
30Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography ; or field flow fractionation;
02Column chromatography
88Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
Applicants
  • 昭和電工株式会社 SHOWA DENKO K.K. [JP]/[JP] (AllExceptUS)
  • 酒井 雄二 SAKAI, Yuji [JP]/[JP] (UsOnly)
  • 大野 博基 OHNO, Hiromoto [JP]/[JP] (UsOnly)
Inventors
  • 酒井 雄二 SAKAI, Yuji
  • 大野 博基 OHNO, Hiromoto
Agents
  • 鈴木 俊一郎 SUZUKI, Shunichiro
Priority Data
2004-28753930.09.2004JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) METHOD FOR TRACE ANALYSIS AND ANALYZER THEREFOR
(FR) PROCÉDÉ D’ANALYSE DE TRACE ET ANALYSEUR IDOINE
(JA) 微量成分の分析方法およびその分析装置
Abstract
(EN)
[PROBLEMS] To provide a method for analyzing trace components contained in a mixed gas containing fluorine gas easily and simply with high precision and an analyzer therefor. [MEANS FOR SOLVING PROBLEMS] A method for trace analysis, characterized by reacting (i) a mixed gas which comprises fluorine gas and a diluent gas and contains trace components with (ii) a hydrogen-containing substance to convert the fluorine gas into hydrogen fluoride, removing the hydrogen fluoride through fixation, and then analyzing the trace components by gas chromatography; and an analyzer for trace components which comprises a reactor tube forreacting (i) a mixed gas which comprises fluorine gas and a diluent gas and contains trace components with (ii) a hydrogen-containing substance, a tube filled with an alkali metal fluoride, a gas sampler composed of a six-way changeover valve capable of changing the flow channel of a carrier gas and a sample measuring tube capable of preparing a certain amount of a sample that is connected to the valve, and a gas chromatograph and which is piped so that the mixed gas and the hydrogen-containing substance can flow in this order.
(FR)
L’invention concerne un procédé d’analyse des composants de trace contenus dans un gaz mélangé contenant du gaz fluor facilement et simplement avec grande précision et un analyseur ad hoc. L’invention porte sur un procédé d’analyse de trace, caractérisé par la mise en réaction (i) d’un gaz mélangé comprenant un gaz fluor et un gaz diluant et contenant des composants de trace avec (ii) une substance contenant de l’hydrogène pour convertir le gaz fluor en fluorure d’hydrogène, par l'éliminationdu fluorure d’hydrogène par fixation, puis par l'analyse des composants de trace par chromatographie gazeuse ; et un analyseur pour composants de trace comprenant un tube réacteur pour la mise en réaction (i) d’un gaz mélangé comprenant un gaz fluor et un gaz diluant et contenant des composants de trace avec (ii) une substance contenant de l’hydrogène, un tube rempli de fluorure de métal alcalin, un échantillonneur de gaz composé d’une valve de commutation six voies capable de changer le canal d’écoulement d’un gaz porteur et un tube de mesure d’échantillon capable de préparer une certaine quantité d’un échantillon qui est connecté à la valve, et un chromatographe au gaz disposant d’une tuyauterie permettant au gaz mélangé et à la substance contenant de l’hydrogène de s’écouler dans cet ordre.
(JA)
[課題]  フッ素ガスを含む混合ガスに含まれる微量成分の分析を簡便かつ精度良く行う方法を提供すること、およびその分析装置を提供すること。  [解決手段]  (i)フッ素ガスと希釈ガスとからなり、微量成分を含有する混合ガス、および  (ii)水素含有物質 を反応させ、該フッ素ガスをフッ化水素に変換し、該フッ化水素を固定化除去した後、ガスクロマトグラフにより該微量成分を分析することを特徴とする微量成分の分析方法、ならびに  (i)フッ素ガスと希釈ガスとからなり、微量成分を含有する混合ガス、および(ii) 水素含有物質を反応させる反応管、  アルカリ金属のフッ化物が充填された管、  キャリアーガスの流路を切り替え可能な六方切り替えバルブに、一定量のサンプルを分取可能な試料計量管が接続されたガスサンプラー、ならびに  ガスクロマトグラフ を有し、前記混合ガスおよび前記水素含有物質がこの順で流れるように配管された、微量成分の分析装置。                                                                               
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