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1. (WO2006031455) LITHOGRAPHY TECHNIQUE USING SILICONE MOLDS
Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
China 31.08.2005200580030625.1
United States of America 12.02.200711659989Published: 22.11.2007
Japan 13.03.20072007531232
Republic of Korea 13.03.20071020077005858Published: 21.05.2007
Granted: 27.11.2012
Expired: 22.02.2016
European Patent Office (EPO) 29.03.20072005793402Published: 04.07.2007
Withdrawn: 05.03.2013