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1. (WO2006019944) TRANSPARENT FILM MEASUREMENTS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2006/019944 International Application No.: PCT/US2005/025045
Publication Date: 23.02.2006 International Filing Date: 14.07.2005
IPC:
G01B 9/02 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
02
Interferometers
Applicants: DELEGA, Xavier, Colonna[FR/US]; US (UsOnly)
ZYGO CORPORATION[US/US]; 21 Laurel Brook Road Middlefield, CT 06455-0488, US (AllExceptUS)
Inventors: DELEGA, Xavier, Colonna; US
Agent: FEIGENBAUM, David, L. ; Fish & Richardson, P.C. 225 Franklin Street Boston, MA 02110-2804, US
Priority Data:
11/180,22313.07.2005US
60/588,13815.07.2004US
Title (EN) TRANSPARENT FILM MEASUREMENTS
(FR) MESURES DE FILM TRANSPARENT
Abstract:
(EN) Thickness of transparent film is measured by utilizing interferometric surface profiles of the film.
(FR) L'invention concerne des techniques de mesure de film transparent.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)