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1. WO2006017847 - SILICON-INSULATOR THIN-FILM STRUCTURES FOR OPTICAL MODULATORS AND METHODS OF MANUFACTURE

Publication Number WO/2006/017847
Publication Date 16.02.2006
International Application No. PCT/US2005/028391
International Filing Date 10.08.2005
Chapter 2 Demand Filed 08.03.2006
IPC
G02F 1/025 2006.1
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
015based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
025in an optical waveguide structure
G02F 1/225 2006.1
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
21by interference
225in an optical waveguide structure
G02B 6/132 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
10of the optical waveguide type
12of the integrated circuit kind
13Integrated optical circuits characterised by the manufacturing method
132by deposition of thin films
CPC
G02B 6/131
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
10of the optical waveguide type
12of the integrated circuit kind
13Integrated optical circuits characterised by the manufacturing method
131by using epitaxial growth
G02B 6/132
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
10of the optical waveguide type
12of the integrated circuit kind
13Integrated optical circuits characterised by the manufacturing method
132by deposition of thin films
G02F 1/025
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
015based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
025in an optical waveguide structure
Applicants
  • HONEYWELL INTERNATIONAL INC. [US]/[US] (AllExceptUS)
  • KEYSER, Thomas [US]/[US] (UsOnly)
  • LARSEN, Bradley, J. [US]/[US] (UsOnly)
  • YUE, Cheisan, J. [US]/[US] (UsOnly)
Inventors
  • KEYSER, Thomas
  • LARSEN, Bradley, J.
  • YUE, Cheisan, J.
Agents
  • HOIRIIS, David, Esq.
Priority Data
10/915,29910.08.2004US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) SILICON-INSULATOR THIN-FILM STRUCTURES FOR OPTICAL MODULATORS AND METHODS OF MANUFACTURE
(FR) STRUCTURES DE FILM MINCE SILICIUM-ISOLANT-SILICIUM DESTINEES A DES MODULATEURS OPTIQUES ET PROCEDES DE FABRICATION ASSOCIES
Abstract
(EN) The present invention provides silicon based thin-film structures that can be used to form high frequency optical modulators. Devices of the invention are formed as layered structures that have a thin-film dielectric layer (18), such as silicon dioxide, sandwiched between silicon layers (16, 20). The silicon layers (16, 20) have high free carrier mobility. In one aspect of the invention a high mobility silicon layer (20) can be provided by crystallizing an amorphous silicon layer. In another aspect of the invention, a high mobility silicon layer (20) can be provided by using selective epitaxial growth and extended lateral overgrowth thereof.
(FR) L'invention concerne des structures de film mince à base de silicium pouvant être utilisées afin de former des modulateurs optiques haute fréquence. Les dispositifs selon l'invention sont créés sous la forme de structures stratifiées présentant une couche diélectrique de film mince, telle que du dioxyde de silicium, prise en sandwich entre des couches de silicium. Les couches de silicium possèdent une mobilité de porteur libre élevée. Dans un mode de réalisation de l'invention, une couche de silicium à mobilité élevée peut être obtenue par cristallisation d'une couche de silicium amorphe. Dans un autre mode de réalisation de l'invention, une couche de silicium à mobilité élevée peut être obtenue par utilisation d'une croissance épitaxiale sélective et d'une surcroissance latérale étendue de celle-ci.
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