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1. (WO2006017163) VERSATILE SEMI-TOROIDAL PROCESSING FURNACE WITH AUTOMATIC AND RECONFIGURABLE WAFER EXCHANGE
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2006/017163 International Application No.: PCT/US2005/024237
Publication Date: 16.02.2006 International Filing Date: 09.07.2005
IPC:
F26B 19/00 (2006.01) ,F27D 11/00 (2006.01)
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
26
DRYING
B
DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
19
Machines or apparatus for drying solid materials or objects not covered by groups F26B9/-F26B17/134
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
27
FURNACES; KILNS; OVENS; RETORTS
D
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
11
Arrangement of elements for electric heating in or on furnaces
Applicants: BAYNE, Christopher, J.[GB/US]; US (UsOnly)
DIAMOND SEMICONDUCTOR, INC.[US/US]; 16548 Oleander Avenue Los Gatos, CA 95032, US (AllExceptUS)
Inventors: BAYNE, Christopher, J.; US
Agent: DORT, David, Bogart; Dort Close IP, PLLC Box 66148 Washington, DC 20035, US
Priority Data:
10/889,30512.07.2004US
11/090,91726.03.2005US
Title (EN) VERSATILE SEMI-TOROIDAL PROCESSING FURNACE WITH AUTOMATIC AND RECONFIGURABLE WAFER EXCHANGE
(FR) FOUR DE TRAITEMENT SEMI-TOROIDAL POLYVALENT A ECHANGE DE PLAQUETTE AUTOMATIQUE ET RECONFIGURABLE
Abstract:
(EN) The present invention comprises a fully automated, fabrication compliant furnace with the advantages of the horizontal most of the advantages of the vertical furnace. One embodiment of the present invention is that it implements a multi-degree motion robot arm to move wafers from a loading area to a WIP station where the wafer are then loaded into wafer boats on a rotating cantilever system or directly onto a specialized and reconfigurable paddle designed to hold wafers: The wafers may be loaded in the horizontal processing position as well as the vertical processing position. Multiple levels of the semi-toroidal horizontal processors allow for multiple batches of wafers to be loaded, processed, cooled, and unloaded by the robot arm. The present invention reduces the footprint of the traditional horizontal or vertical furnaces, increases capacity and throughput, and allows for direct tube transfer.
(FR) L'invention concerne un four conforme entièrement automatique, ayant les avantages du four horizontal et la plupart des avantages du four vertical. Selon une variante, on décrit un bras de robot à mouvement sur plusieurs degrés pour le déplacement de plaquettes depuis une zone de chargement vers un poste de passage temporaire en cours de production (WIP), où la plaquette est ensuite chargée dans des porte-plaquettes sur un système en porte-à-faux rotatif ou directement sur un support de plaquettes spécialisé et reconfigurable. On peut charger les plaquettes en position de traitement horizontale et en position de traitement verticale. Les niveaux multiples des processeurs horizontaux semi-toroïdaux permettent le chargement, le traitement, le refroidissement et le déchargement de plusieurs lots de plaquettes, via le bras de robot. On réduit ainsi l'empreinte des fours horizontaux et verticaux classiques, en augmentant la capacité et le débit, et en permettant un transfert de tube direct.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)