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Machine translation
1. (WO2006016958) A FILM BULK ACOUSTIC RESONATOR PACKAGE AND METHOD OF FABRICATING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/016958    International Application No.:    PCT/US2005/020793
Publication Date: 16.02.2006 International Filing Date: 13.06.2005
IPC:
H01L 29/82 (2006.01), H01L 21/30 (2006.01)
Applicants: AGILENT TECHNOLOGIES, INC. [US/US]; 395 Page Mill Road, Palo Alto, CA 94306 (US) (For All Designated States Except US)
Inventors: LARSON, John, D. III; (US).
BAI, Qing; (US).
MATTA, Farid; (US).
VERHOEVEN, Tracy; (US)
Agent: HARDCASTLE, Ian; Agilent Technologies, Inc., Intellectual Property Administration, M/S DL-429, P.O. Box 7599, Loveland, CO 80537-0599 (US)
Priority Data:
10/890,343 13.07.2004 US
Title (EN) A FILM BULK ACOUSTIC RESONATOR PACKAGE AND METHOD OF FABRICATING SAME
(FR) BOÎTIER DE FBAR (FILM BULK ACOUSTIC RESONATOR) ET MÉTHODE DE FABRICATION DE CELUI-CI
Abstract: front page image
(EN)A microfabricated device (15) has a first substrate (21), a second substrate, a film bulk acoustic resonator (FBAR) device (50), and a circuit (52). The second substrate is bonded to the first substrate to define a chamber (44). The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection (27, 56, 59) connects the circuit and the FBAR device.
(FR)L’invention concerne un dispositif microfabriqué (15) possédant un premier substrat (21), un deuxième substrat, un dispositif FBAR (film bulk acoustic resonator) (50) et un circuit (52). Le deuxième substrat est scellé au premier substrat de façon à définir une chambre (44). Le dispositif FBAR est situé sur une surface du premier substrat et à l’intérieur de la chambre. Le circuit est situé sur une surface du deuxième substrat et à l’intérieur de la chambre. Une connexion électrique (27, 56, 59) raccorde le circuit et le dispositif FBAR.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)