WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2006011942) ANGLED ELONGATED FEATURES FOR IMPROVED ALIGNMENT PROCESS INTEGRATION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2006/011942    International Application No.:    PCT/US2005/019723
Publication Date: 02.02.2006 International Filing Date: 03.06.2005
IPC:
H01L 23/544 (2006.01)
Applicants: INTEL CORPORATION [US/US]; (a corporation of Delware), 2200 Mission College Boulevard, Santa Clara, CA 95052 (US) (For All Designated States Except US).
HUGGINS, Kevin [US/US]; (US) (For US Only)
Inventors: HUGGINS, Kevin; (US)
Agent: HARRIS, Scott, C.; Fish & Richardson P.C., 4350 La Jolla Village Drive, Suite 500, San Diego, CA 92122 (US)
Priority Data:
10/875,065 23.06.2004 US
Title (EN) ANGLED ELONGATED FEATURES FOR IMPROVED ALIGNMENT PROCESS INTEGRATION
(FR) ELEMENTS ALLONGES ANGULAIRES PERMETTANT D'AMELIORER L'INTEGRATION DE PROCESSUS D'ALIGNEMENT
Abstract: front page image
(EN)Elongated features may be incorporated at least partially in an alignment region. The alignment region may be defined by a plurality of alignment features aligned along a first axis. A long axis of the elongated features may be neither parallel nor perpendicular to the first axis. The alignment features aligned a second axis that is not parallel to the first axis. The second axis may be neither parallel to or perpendicular to the long axis.
(FR)L'invention concerne des éléments allongés pouvant être incorporés au moins partiellement dans une zone d'alignement. La zone d'alignement peut être définie par une pluralité d'éléments d'alignement alignés le long d'un premier axe. Un axe long associé aux éléments allongés peut être ni parallèle ni perpendiculaire au premier axe. La zone d'alignement peut également comprendre une autre pluralité d'éléments d'alignement alignés sur un second axe non parallèle au premier axe. Le second axe peut être ni parallèle ni perpendiculaire à l'axe long.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)