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1. (WO2006010128) MAINTENANCE, DIAGNOSIS AND OPTIMIZATION OF PROCESSES
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2006/010128 International Application No.: PCT/US2005/024580
Publication Date: 26.01.2006 International Filing Date: 11.07.2005
Chapter 2 Demand Filed: 07.02.2006
IPC:
G06F 19/00 (2006.01) ,G06F 11/30 (2006.01) ,G01N 37/00 (2006.01)
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
F
ELECTRIC DIGITAL DATA PROCESSING
19
Digital computing or data processing equipment or methods, specially adapted for specific applications
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
F
ELECTRIC DIGITAL DATA PROCESSING
11
Error detection; Error correction; Monitoring
30
Monitoring
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
37
Details not covered by any other group of this subclass
Applicants:
ONWAFER TECHNOLOGIES, INC. [US/US]; 6591.A Sierra Lane Dublin, CA 94568, US (AllExceptUS)
Inventors:
MACDONALD, Paul, D.; US
KRUGER, Michiel; US
WELCH, Michael; US
FREED, Mason, L.; US
SPANOS, Costas, J.; US
Agent:
WILLIAMS, Larry; 3645 Montgomery Drive Santa Rosa, CA 95405, US
Priority Data:
60/586,89210.07.2004US
Title (EN) MAINTENANCE, DIAGNOSIS AND OPTIMIZATION OF PROCESSES
(FR) PROCEDE ET APPAREILS DE MAINTENANCE, DE DIAGNOSTIC ET D'OPTIMISATION DE PROCEDES
Abstract:
(EN) A method and system (50) for monitoring processes, optimizing processes, and diagnosing problems in the performance of a process tool for processing a workpiece. One embodiment of the present invention includes a software program that can be implemented in a computer for optimizing the performance of a process tool for processing a workpiece. System 50 includes a design experiments module (60), a perturbation model builder (70) and a data analysis module (75).
(FR) L'invention porte, dans un aspect, sur un procédé de surveillance de procédés, d'optimisation de procédés, et de diagnostic de problèmes relatifs à la performance d'un instrument de traitement permettant de traiter une pièce à travailler. Dans un autre aspect, l'invention concerne un système configuré pour surveiller des procédés, optimiser des procédés et diagnostiquer des problèmes relatifs à la performance d'un instrument de traitement servant à traiter une pièce à travailler. Un mode de réalisation de l'invention comprend un programme logiciel qui peut être installé dans un ordinateur afin d'optimiser la performance d'un instrument de traitement d'une pièce à travailler.
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)