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1. (WO2005124816) ABERRATION CORRECTION DEVICE AND METHOD FOR OPERATING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/124816    International Application No.:    PCT/EP2005/006647
Publication Date: 29.12.2005 International Filing Date: 20.06.2005
IPC:
H01J 37/153 (2006.01), H01J 37/05 (2006.01), H01J 37/28 (2006.01)
Applicants: ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH [DE/DE]; Ammerthalstrasse 20a, 85551 Heimstetten (DE) (For All Designated States Except US).
FROSIEN, Jürgen [DE/DE]; (DE) (For US Only)
Inventors: FROSIEN, Jürgen; (DE)
Agent: ZIMMERMANN, Gerd; ZIMMERMANN & PARTNER, P.O. Box 330 920, 80069 Munich (DE)
Priority Data:
04014507.0 21.06.2004 EP
Title (EN) ABERRATION CORRECTION DEVICE AND METHOD FOR OPERATING SAME
(FR) DISPOSITIF DE CORRECTION D'ABERRATION, ET PROCEDE POUR FAIRE FONCTIONNER CE DISPOSITIF
Abstract: front page image
(EN)The present invention provides an aberration correction device (100). The aberration correction device comprises a Wien filter element (110), a quadrupole element (310) for compensating a focusing property of the Wien filter element (110), and at least one multipole element (410) for spherical aberration correction. The Wien filter element (110) and said quadrupole element (310) are adapted to generate, in combination, an astigmatic image. Furthermore, the at least one multipole element (410) is adapted to act essentially in a plane of sagittal or meridional focus of the astigmatic image. Thereby, chromatic aberration is reduced as well as spherical aberration can be corrected.
(FR)L'invention concerne un dispositif de correction d'aberration (100). Ce dispositif comprend un élément filtre de Wien (110), un élément quadrupôle (310) pour compenser la propriété de focalisation de l'élément filtre de Wien (110), et au moins un élément multipôle (410) servant à la correction d'aberrations sphériques. L'élément filtre de Wien (110) et l'élément quadrupôle (310) sont conçus pour générer, en synergie, une image astigmate. En outre, le(s) élément(s) multipôle(s) (410) est/sont conçu(s) pour agir essentiellement dans un plan focal sagittal ou méridien de l'image astigmate. Ainsi, l'invention permet de réduire les aberrations chromatiques et de corriger les aberrations sphériques.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)