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Machine translation
1. (WO2005121417) SUPPORT SYSTEM FOR TREATMENT APPARATUSES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/121417    International Application No.:    PCT/IT2004/000335
Publication Date: 22.12.2005 International Filing Date: 09.06.2004
IPC:
C30B 25/12 (2006.01), C23C 16/458 (2006.01)
Applicants: E.T.C. EPITAXIAL TECHNOLOGY CENTER S.R.L. [IT/IT]; Corso Italia 207, I-95127 Catania (IT) (For All Designated States Except US).
SPECIALE NATALE [IT/IT]; (IT) (For US Only).
VALENTE, Gianluca [IT/IT]; (IT) (For US Only).
CRIPPA, Danilo [IT/IT]; (IT) (For US Only).
POZZETTI, Vittorio [IT/IT]; (IT) (For US Only).
PRETI, Franco [IT/IT]; (IT) (For US Only)
Inventors: SPECIALE NATALE; (IT).
VALENTE, Gianluca; (IT).
CRIPPA, Danilo; (IT).
POZZETTI, Vittorio; (IT).
PRETI, Franco; (IT)
Agent: FERRONI, Filippo; c/o Dragotti & Associati Srl, Galleria San Babila, 4/C, I-20122 Milano (IT)
Priority Data:
Title (EN) SUPPORT SYSTEM FOR TREATMENT APPARATUSES
(FR) SYSTEME DE SUPPORT POUR APPAREILS DE TRAITEMENT
Abstract: front page image
(EN)A support system (1) for an apparatus of the type able to treat substrates and/or wafers is described, said system comprising a fixed base element (10) having a substantially flat surface in which a substantially cylindrical seat (11) with a substantially flat bottom is formed, and a movable support element (20) having a substantially disc-shaped form, being housed inside the seat (11), being able to rotate about the axis of the seat 811) and having a substantially flat upper side provided with at least one cavity (21) for a substrate or wafer and a substantially flat bottom side; one or more passages (12) for one or more gas flows are provided, which passages (12) emerge inside the seat (11) in directions which are inclined and preferably skew with respect to its axis, in such a way as to lift and rotate the support element (20).
(FR)L'invention concerne un système de support (1) pour un appareil de type permettant de traiter des substrats et/ou des plaquettes. Ce système comprend : un élément support fixe (10) présentant une surface sensiblement plate dans laquelle un siège sensiblement cylindrique (11) qui comprend un fond sensiblement plat est formé ; et un élément support mobile (20) de forme sensiblement discoïde, logé à l'intérieur du siège (11), pouvant tourner autour de l'axe dudit siège (11) et possédant un côté supérieur sensiblement plat pourvu d'au moins une cavité (21) pour un substrat ou une plaquette et un côté inférieur sensiblement plat. Un ou plusieurs passages (12) pour un ou plusieurs flux gazeux sont également présents, lesdits passages (12) émergeant à l'intérieur du siège (11) dans des directions inclinées et de préférence obliques par rapport à son axe, de façon à soulever et à faire tourner ledit élément support (20).
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)