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1. (WO2005121401) THIN FILM-FORMING MATERIAL AND METHOD FOR PRODUCING THIN FILM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/121401    International Application No.:    PCT/JP2005/009932
Publication Date: 22.12.2005 International Filing Date: 31.05.2005
IPC:
C23C 16/40 (2006.01), C07C 49/92 (2006.01), C07F 3/06 (2006.01)
Applicants: ADEKA CORPORATION [JP/JP]; 2-35, Higashiogu 7-chome, Arakawa-ku, Tokyo 116-8554 (JP) (For All Designated States Except US).
YAMADA, Naoki [JP/JP]; (JP) (For US Only).
TANAKA, Shinichi [JP/JP]; (JP) (For US Only)
Inventors: YAMADA, Naoki; (JP).
TANAKA, Shinichi; (JP)
Agent: HATORI, Osamu; Akasaka HKN BLDG. 6F 8-6, Akasaka 1-chome Minato-ku, Tokyo 1070052 (JP)
Priority Data:
2004-175122 14.06.2004 JP
Title (EN) THIN FILM-FORMING MATERIAL AND METHOD FOR PRODUCING THIN FILM
(FR) MATÉRIAU DE FORMATION DE COUCHE MINCE ET PROCÉDÉ DE PRODUCTION DE COUCHE MINCE
(JA) 薄膜形成用原料及び薄膜の製造方法
Abstract: front page image
(EN)Disclosed is a thin film-forming material which contains a bis(&bgr;-diketonato)zinc compound that is liquid at 25˚C and is suitable for forming a zinc-containing thin film. By using such a thin film-forming material, a thin film can be produced with stable film-forming rate and stable thin film composition control without suffering from problems of raw material gas suppliability or in-line raw material transport. Preferable examples of the bis(&bgr;-diketonato)zinc compound may include bis(octane-2,4-dionato)zinc and bis(2,2-dimethyl-6-ethyldecane-3,5-dionato)zinc.
(FR)Le matériau de formation de couche mince décrit contient un composé de bis(&bgr;-dicétonato)zinc qui est liquide à 25°C et convient pour former une couche mince contenant du zinc. En utilisant un tel matériau de formation de couche mince, une couche mince peut être produite avec un taux stable de formation de couche et un contrôle de composition stable de couche mince sans poser de problèmes d'approvisionnement en gaz de matériau brut ou de transport direct de matériau brut. Des exemples de composé de bis(&bgr;-dicétonato)zinc peuvent inclure le bis(octane-2,4-dionato)zinc et le bis(2,2-diméthyl-6-éthyldécane-3,5-dionato)zinc.
(JA)not available
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)