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1. (WO2005120130) ELECTROSTATIC CAPACITY TYPE ULTRASONIC VIBRATOR, MANUFACTURING METHOD THEREOF, AND ELECTROSTATIC CAPACITY TYPE ULTRASONIC PROBE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/120130    International Application No.:    PCT/JP2005/010163
Publication Date: 15.12.2005 International Filing Date: 02.06.2005
IPC:
H04R 19/00 (2006.01), A61B 8/00 (2006.01), G01N 29/24 (2006.01), H04R 23/00 (2006.01)
Applicants: OLYMPUS CORPORATION [JP/JP]; 43-2, Hatagaya 2-chome, Shibuya-ku, Tokyo 1510072 (JP) (For All Designated States Except US).
ADACHI, Hideo [JP/JP]; (JP) (For US Only).
SAWADA, Yukihiko; (For US Only).
WAKABAYASHI, Katsuhiro; (For US Only).
MIZUNUMA, Akiko; (For US Only).
IMAHASHI, Takuya; (For US Only).
OMURA, Masayoshi; (For US Only).
OKUNO, Yoshiyuki; (For US Only).
OTANI, Shuji; (For US Only).
MURAKAMI, Miyuki; (For US Only).
NEMOTO, Kiyoshi; (For US Only).
SUZUKI, Kozaburo; (For US Only).
SHIMODA, Naomi; (For US Only)
Inventors: ADACHI, Hideo; (JP).
SAWADA, Yukihiko; .
WAKABAYASHI, Katsuhiro; .
MIZUNUMA, Akiko; .
IMAHASHI, Takuya; .
OMURA, Masayoshi; .
OKUNO, Yoshiyuki; .
OTANI, Shuji; .
MURAKAMI, Miyuki; .
NEMOTO, Kiyoshi; .
SUZUKI, Kozaburo; .
SHIMODA, Naomi;
Agent: ITOH, Susumu; Musashi Bldg., 4-4, Nishishinjuku 7-chome, Shinjuku-ku, Tokyo 1600023 (JP)
Priority Data:
2004-165934 03.06.2004 JP
2004-170334 08.06.2004 JP
2004-176040 14.06.2004 JP
2004-181521 18.06.2004 JP
Title (EN) ELECTROSTATIC CAPACITY TYPE ULTRASONIC VIBRATOR, MANUFACTURING METHOD THEREOF, AND ELECTROSTATIC CAPACITY TYPE ULTRASONIC PROBE
(FR) VIBRATEUR ULTRASONIQUE DU TYPE CAPACITÉ ÉLECTROSTATIQUE, MÉTHODE DE FABRICATION, ET SONDE ULTRASONIQUE DU TYPE CAPACITÉ ÉLECTROSTATIQUE
(JA) 静電容量型超音波振動子とその製造方法、静電容量型超音波プローブ
Abstract: front page image
(EN)An electrostatic capacity type ultrasonic vibrator includes a membrane (9) having one electrode (7) formed on the surface of the ultrasonic transmission/reception side, a cavity (13) configured on its rear surface, and a substrate (2) on which the membrane (9) and the cavity (13) are supported and the other electrode (12) is arranged. The electrostatic capacity type ultrasonic vibrator is characterized in that the membrane (9) includes a plurality of layers, at least one of which is a high dielectric film (8). Accordingly, it is possible to obtain a high sound pressure in a high frequency region.
(FR)Un vibrateur ultrasonique du type capacité électrostatique inclut une membrane (9) avec une électrode (7) formée sur la surface du côté de transmission/réception ultrasonique, une cavité (13) configurée sur sa surface arrière, et un substrat (2) sur lequel la membrane (9) et la cavité (13) sont appuyées et l’autre électrode (12) est disposée. Le vibrateur ultrasonique du type capacité électrostatique se caractérise par le fait que la membrane (9) inclut plusieurs couches, dont une au moins est un film diélectrique (8). En conséquence, il est possible d’obtenir une pression sonore élevée dans une région de haute fréquence.
(JA) 超音波送受信側の面に、一方の電極7を形成したメンブレン9と、その背面に構成されたキャビティ13と、これらを載置支持し、その表面に他の電極12を配設した基板2とからなる静電容量型超音波振動子であり、前記メンブレン9が複数の層からなり、その内の少なくとも一層が、高誘電率膜8からなることを特徴とする静電容量型超音波振動子により、高い周波数領域で高い音圧を得ることができるようにした。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)