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1. (WO2005116667) PROBE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/116667    International Application No.:    PCT/JP2005/009177
Publication Date: 08.12.2005 International Filing Date: 19.05.2005
G01R 1/067 (2006.01), H01L 21/66 (2006.01)
Applicants: National Institute for Materials Science [JP/JP]; 1-2-1, Sengen, Tsukuba-shi, Ibaraki 3050047 (JP) (For All Designated States Except US).
Japan Electronic Materials Corporation [JP/JP]; 2-5-13, Nishinagasu-cho, Amagasaki-shi, Hyogo 6600805 (JP) (For All Designated States Except US).
MACHIDA, Kazumichi [JP/JP]; (JP) (For US Only).
URATA, Atsuo [JP/JP]; (JP) (For US Only).
KONNO, Takeshi [JP/JP]; (JP) (For US Only).
ISHIDA, Akira [JP/JP]; (JP) (For US Only).
EGASHIRA, Mitsuru [JP/JP]; (JP) (For US Only).
KOBAYASHI, Mikihiko [JP/JP]; (JP) (For US Only)
Inventors: MACHIDA, Kazumichi; (JP).
URATA, Atsuo; (JP).
KONNO, Takeshi; (JP).
ISHIDA, Akira; (JP).
EGASHIRA, Mitsuru; (JP).
KOBAYASHI, Mikihiko; (JP)
Agent: ONISHI, Takaharu; Diapalace Tanimachi No.2, 5-6-9, Tanimachi, Chuo-ku, Osaka-shi, Osaka 5400012 (JP)
Priority Data:
2004-161844 31.05.2004 JP
Title (EN) PROBE
(JA) プローブ
Abstract: front page image
(EN)[OBJECT] The object of the invention is to provide a probe which, even if it is made into a microstructural form, is capable of providing stabilized electric conduction for an electrode which is a subject to be measured. [CONSTITUTION] A probe (100) comprises a columnar contact (110) capable of contacting an electrode (10), which is a subject to be measured, substantially perpendicularly thereto, and a base end not shown in the drawing, which is a member continuous with the contact (110). The contact (110) has a base (111), and an expansion section (111a) joined to the widthwise end of the base (111). The expansion section(111a) is made of a material greater in coefficient of thermal expansion than the base (111).
(FR)[OBJET] L’objet de l’invention porte sur une sonde qui, même de forme microstructurelle, est capable d’obtenir une conduction électrique stabilisée pour une électrode formant un sujet à mesurer. [CONSTITUTION] Une sonde (100) comprend un contact colonnaire (110) capable de toucher une électrode (10), formant un sujet à mesurer, sensiblement perpendiculaire à celle-ci, et une extrémité de base non illustrée sur le dessin, formant un élément continu avec le contact (110). Le contact (110) possède une base (111), et une section d’expansion (111a) jointe à l’extrémité dans la largeur de la base (111). La section d’expansion (111a) est formée d’un matériau de plus grand coefficient d’expansion thermique que la base (111).
(JA)【目的】 本発明の目的は、微細化したとしても、測定対象の電極と安定した電気的導通を図ることができるプローブを提供することにある。 【構成】 プローブ100は、測定対象の電極10に対して略垂直に接触可能な円柱状の接触部110と、この接触部110と連なる部材である図示しない基端部とを具備しており、接触部110は、基部111と、この基部111の幅方向の端部に接合された膨張部111aとを有し、この膨張部111aが基部111よりも熱膨張率が大きい材料で構成されている。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)