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Machine translation
1. (WO2005116525) ON-SITE GENERATION, PURIFICATION, AND DISTRIBUTION OF ULTRA-PURE ANHYDROUS AMMONIA
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/116525    International Application No.:    PCT/US2005/017085
Publication Date: 08.12.2005 International Filing Date: 17.05.2005
Chapter 2 Demand Filed:    15.12.2005    
IPC:
C01C 1/12 (2006.01)
Applicants: MATHESON TRI-GAS, INC. [US/US]; P.O. Box 624, Route 46 East, Parsippany, NJ 07054-0624 (US) (For All Designated States Except US).
DEL PRATO, Thomas, A. [US/US]; (US) (For US Only).
SPICER, Harold, G. [US/US]; (US) (For US Only)
Inventors: DEL PRATO, Thomas, A.; (US).
SPICER, Harold, G.; (US)
Agent: BURTON, Carol, W.; Hogan & Hartson, LLP, 1200 17th Street, Suite 1500, Denver, CO 80202 (US)
Priority Data:
60/572,256 18.05.2004 US
Title (EN) ON-SITE GENERATION, PURIFICATION, AND DISTRIBUTION OF ULTRA-PURE ANHYDROUS AMMONIA
(FR) GENERATION, PURIFICATION ET DISTRIBUTION SUR PLACE D'AMMONIAC ANHYDRE ULTRA-PUR
Abstract: front page image
(EN)A system and method for generating, purifying, and using ultra-pure ammonia on-site, such as at a semiconductor manufacturing facility. The system includes an ammonia generation system configured to generate ammonia including carbon dioxide, water, and other impurities. A purification system is provided with the generation system in the manufacturing facility and is linked to the output of the generation system. The purification system processes the effluent from the ammonia generation system to remove substantially all of the carbon dioxide, water, and other impurities to produce an outlet stream of ultra-pure ammonia. The system further includes a point of use system provided at the same manufacturing facility to utilize the outlet stream of ultra-pure ammonia.
(FR)La présente invention concerne un système et un procédé permettant de générer, de purifier et d'utiliser de l'ammoniac ultra-pur sur place, par exemple dans une installation de fabrication de semi-conducteurs. Ce système comprend un système de génération d'ammoniac conçu pour générer de l'ammoniac composé de dioxyde de carbone, d'eau et d'autres impuretés. Un système de purification, utilisé avec le système de génération dans l'installation de fabrication, est relié à la sortie du système de génération. Le système de purification traite l'effluent sortant du système de génération d'ammoniac pour éliminer substantiellement le dioxyde de carbone, l'eau et les autres impuretés afin qu'on obtienne un flux de sortie d'ammoniac ultra-pur. Le système comprend en outre un système de point d'utilisation également situé dans l'installation de fabrication et permettant d'utiliser le flux de sortie d'ammoniac ultra-pur.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NG, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)