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Machine translation
1. (WO2005114091) METHOD AND DEVICE FOR MEASURING WHETHER A PROCESS KIT PART MEETS A PRESCRIBED TOLERANCE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/114091    International Application No.:    PCT/US2005/003024
Publication Date: 01.12.2005 International Filing Date: 27.01.2005
IPC:
G01B 3/50 (2006.01)
Applicants: TOKYO ELECTRON LIMITED [JP/JP]; 3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481 (JP) (For All Designated States Except US).
FINK, Steven, T. [US/US]; (US) (For US Only)
Inventors: FINK, Steven, T.; (US)
Agent: MAIER, Gregory, J.; Oblon, Spivak, McClelland, Maier & Neustadt, P.C., 1940 Duke Street, Alexandria, VA 22314 (US)
Priority Data:
10/806,400 23.03.2004 US
Title (EN) METHOD AND DEVICE FOR MEASURING WHETHER A PROCESS KIT PART MEETS A PRESCRIBED TOLERANCE
(FR) PROCEDE ET DISPOSITIF POUR MESURER LA CORRESPONDANCE ENTRE UNE PIECE D'UN KIT DE TRAITEMENT ET UNE TOLERANCE ETABLIE
Abstract: front page image
(EN)A go no-go gauge and method for verifying whether a process kit part used within a plasma chamber of a plasma processing tool has accumulated excessive wear or deposits. The gauge includes a component for verifying whether a dimension of a process kit part feature violates a prescribed size tolerance, the violation indicating that the process kit part has accumulated excessive wear or deposits.
(FR)L'invention concerne une jauge entre-n'entre pas et un procédé permettant de vérifier si une partie du matériel de traitement utilisée dans une chambre à plasma d'un outil de traitement plasma a accumulé des dépôts ou une usure excessifs. La jauge comprend un composant permettant de vérifier si une dimension d'une caractéristique de partie du matériel de traitement dépasse une tolérance de taille prescrite, le dépassement indiquant que la partie du matériel de traitement a accumulé des dépôts ou une usure excessifs.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)