Search International and National Patent Collections

1. (WO2005106069) METHOD AND DEVICE FOR THE CONTINUOUS COATING OF FLAT SUBSTRATES WITH OPTICALLY ACTIVE LAYER SYSTEMS

Pub. No.:    WO/2005/106069    International Application No.:    PCT/DE2005/000857
Publication Date: Fri Nov 11 00:59:59 CET 2005 International Filing Date: Tue May 03 01:59:59 CEST 2005
IPC: C03C 17/00
C23C 14/35
C23C 14/56
Applicants: VON ARDENNE ANLAGENTECHNIK GMBH
SCHULZE, Dietmar
LIST, Matthias
Inventors: SCHULZE, Dietmar
LIST, Matthias
Title: METHOD AND DEVICE FOR THE CONTINUOUS COATING OF FLAT SUBSTRATES WITH OPTICALLY ACTIVE LAYER SYSTEMS
Abstract:
The invention relates to a device and corresponding method for the continuous coating of flat substrates with optically active layer systems, comprising multiple partial layers, divided into individual coating compartments with magnetrons, provided with targets, said coating compartments being provided with vacuum pumps for the evacuation thereof separately from each other. The aim of the invention is to reduce to the complexity of the gas separation between pump compartments and hence reduce the production cost and the complexity for the operator of vacuum coating plants with a long layout. Said aim is achieved, whereby, on deposition of at least two partial layers of a layer system, lying one on the other, the targets on the magnetrons for the correspondingly serially arranged coating compartments are made from the material of the layer for generation and both coating compartments (8; 13)are connected to each other by means of a flow resistance with the omission of an intermediate gas lock.