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1. (WO2005066998) INTERFERENCE INSTRUMENT
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/066998    International Application No.:    PCT/JP2005/000111
Publication Date: 21.07.2005 International Filing Date: 07.01.2005
IPC:
G01B 9/02 (2006.01), G01B 15/00 (2006.01), H01J 37/295 (2006.01), H01J 37/305 (2006.01)
Applicants: RIKEN [JP/JP]; 2-1, Hirosawa, Wako-shi, Saitama 3510198 (JP) (For All Designated States Except US).
HARADA, Ken [JP/JP]; (JP) (For US Only).
AKASHI, Tetsuya [JP/JP]; (JP) (For US Only).
TOGAWA, Yoshihiko [JP/JP]; (JP) (For US Only).
MATSUDA, Tsuyoshi [JP/JP]; (JP) (For US Only).
MORIYA, Noboru [JP/JP]; (JP) (For US Only)
Inventors: HARADA, Ken; (JP).
AKASHI, Tetsuya; (JP).
TOGAWA, Yoshihiko; (JP).
MATSUDA, Tsuyoshi; (JP).
MORIYA, Noboru; (JP)
Agent: OGAWA, Katsuo; 8th Floor No.17 Arai Building, 3-3, Shinkawa 1-chome, Chuo-ku, Tokyo 1040033 (JP)
Priority Data:
2004-004156 09.01.2004 JP
Title (EN) INTERFERENCE INSTRUMENT
(FR) INSTRUMENT D'INTERFÉRENCE
(JA) 干渉装置
Abstract: front page image
(EN)The technical problem that the interference fringe interval (s) and the interference area width (W) which are important parameters of an interferometer using an electron beam bi-prism cannot be controlled independently of each other is solve. Two electron beam bi-prisms (9u, 9b) are used and arranged in two stages along the optical axis, and the electrode voltages of the electron beam bi-prisms are separately controlled, thereby independently controlling the interference fringe interval (s) and the interference area width (W). Simultaneously the Fresnel diffraction is avoided.
(FR)La présente invention vise à résoudre le problème technique du contrôle mutuellement indépendant de l'intervalle/des intervalles de frange d'interférence et la largeur de la zone d'interférence (W) qui sont des paramètres importants d'un interféromètre utilisant un double prisme de faisceau électronique. Deux prismes doubles (9u, 9b) sont utilisés et disposés en deux étages le long de l'axe optique, et les tensions d'électrodes des prismes doubles sont contrôlées séparément, permettant ainsi le contrôle indépendant de l'intervalle/des intervalles de frange d'interférence et de la largeur de la zone d'interférence (W). Dans le même temps, on évite la diffraction de Fresnel.
(JA)not available
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)