Publication Number
WO/2005/064404
Publication Date
14.07.2005
International Application No.
PCT/EP2004/013576
International Filing Date
30.11.2004
Applicants
-
CARL ZEISS SMT AG
[DE]/[DE]
(AllExceptUS)
-
KUGLER, Jens
[DE]/[DE] (UsOnly)
-
SORG, Franz
[DE]/[DE] (UsOnly)
-
WURMBRAND, Andreas
[DE]/[DE] (UsOnly)
-
ITTNER, Thomas
[DE]/[DE] (UsOnly)
-
SCHLETTERER, Thomas
[DE]/[DE] (UsOnly)
Inventors
-
KUGLER, Jens
-
SORG, Franz
-
WURMBRAND, Andreas
-
ITTNER, Thomas
-
SCHLETTERER, Thomas
Agents
-
LORENZ, Werner
Publication Language
English (EN)
Filing Language
English (EN)
Designated States
AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)