| H | ELECTRICITY |
| 01 | BASIC ELECTRIC ELEMENTS |
| L | SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR |
| 21 | Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof |
| 70 | Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof |
| 77 | Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate |
| 78 | with subsequent division of the substrate into plural individual devices |
| 82 | to produce devices, e.g. integrated circuits, each consisting of a plurality of components |
| 822 | the substrate being a semiconductor, using silicon technology |
| 8232 | Field-effect technology |
| 8234 | MIS technology ; , i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type |
| 8238 | Complementary field-effect transistors, e.g. CMOS |
| 823828 | with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes |
| 823842 | gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures |
