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Machine translation
1. (WO2005061758) TRANSFER SYSTEM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/061758    International Application No.:    PCT/GB2004/005346
Publication Date: 07.07.2005 International Filing Date: 21.12.2004
IPC:
C23C 14/56 (2006.01), C23C 16/44 (2006.01), H01L 21/00 (2006.01), H01L 21/677 (2006.01)
Applicants: THE BOC GROUP PLC [GB/GB]; Chertsey Road, Windlesham, Surrey GU20 6HJ (GB) (For All Designated States Except US).
COLES, Stuart, Charles [GB/GB]; (GB) (For US Only).
TURRELL, David, Alan [GB/GB]; (GB) (For US Only).
LASKEY, Kristian [GB/GB]; (GB) (For US Only).
WATSON, Allister [GB/GB]; (GB) (For US Only).
MANSON, David, Paul [GB/GB]; (GB) (For US Only)
Inventors: COLES, Stuart, Charles; (GB).
TURRELL, David, Alan; (GB).
LASKEY, Kristian; (GB).
WATSON, Allister; (GB).
MANSON, David, Paul; (GB)
Agent: BOOTH, Andrew, Steven; The Boc Group Plc, Chertsey Road, Windlesham, Surrey GU20 6HJ (GB)
Priority Data:
0329933.6 24.12.2003 GB
Title (EN) TRANSFER SYSTEM
(FR) SYSTEME DE TRANSFERT
Abstract: front page image
(EN)Two techniques are described for inhibiting the Wilson Cloud Effect formed during rapid reduction in pressure in a load lock chamber, which can cause particulate deposits to be formed on a substrate located within the chamber. In a first technique, the relative humidity of gas within the load lock chamber is reduced by replacing atmospheric air with a dry inert gas. This gas is retained within the system and recirculated between pumping cycles to reduce cost. In a second technique, during pump down the temperature and pressure of the venting gas within the load lock chamber are monitored to maximise the speed of evacuation whilst inhibiting the Wilson Cloud Effect.
(FR)On décrit deux techniques utiles pour inhiber l'effet de Wilson qui se produit lors d'une diminution rapide de la pression dans une chambre de blocage de charge, pouvant provoquer la formation de dépôts particulaires sur un substrat situé dans la chambre. Dans la première technique, l'humidité relative du gaz présent dans la chambre de blocage de charge est réduite du fait du remplacement de l'air atmosphérique par un gaz inerte sec. Ce gaz est retenu dans le système et remis en circulation entre les cycles de pompage pour réduire les coûts. Dans la deuxième technique, pendant la vidange la température et la pression du gaz de ventilation dans la chambre de blocage de charge sont surveillées pour maximiser la vitesse d'évacuation tout en empêchant l'effet de Wilson.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SM, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)