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Pub. No.: WO/2005/038077 International Application No.: PCT/EP2004/011669
Publication Date: 28.04.2005 International Filing Date: 15.10.2004
IPC:
C23C 14/34 (2006.01) ,C23C 14/32 (2006.01) ,H01J 37/34 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
32
by explosion; by evaporation and subsequent ionisation of the vapours
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
34
operating with cathodic sputtering
Applicants: CSELLE, Tibor[DE/CH]; CH (UsOnly)
JILEK, Mojmir[CZ/CZ]; CZ (UsOnly)
PLATIT AG[CH/CH]; Moosstrasse 68-78 CH-2540 Grenchen, CH (AllExceptUS)
PIVOT A.S.[CZ/CZ]; Prumyslova 3 787 01 Sumperk, CZ (AllExceptUS)
Inventors: CSELLE, Tibor; CH
JILEK, Mojmir; CZ
Agent: R.A. EGLI & CO.; Horneggstrasse 4 Postfach CH-8034 Zürich, CH
Priority Data:
03405753.917.10.2003EP
Title (EN) MODULAR DEVICE FOR COATING SURFACES
(FR) DISPOSITIF MODULAIRE POUR LE REVETEMENT DE SURFACES, NOTAMMENT POUR LE REVETEMENT MODULAIRE SPECIALISE
(DE) MODULARE VORRICHTUNG ZUR BESCHICHTUNG VON OBERFLÄCHEN
Abstract:
(EN) The invention relates to a vacuum chamber for coating items (10) in which a physical vapor deposition method (PVD) is carried out. The aim of the invention is to create a vacuum chamber of the aforementioned kind which can be provided with modular cathodes. For this purpose, the vacuum chamber is provided with a plurality of receiving devices in which a plurality of cathodes each can be arranged. A first receiving device (30) for receiving one or more cathodes (40, 42, 44, 46) is provided substantially in the center of the vacuum chamber (20) and two additional receiving devices (32, 34) for receiving at least one cathode (48, 50, 52, 54) each are provided on the edges of the vacuum chamber (20) in a door-like manner.
(FR) L'invention vise à équiper de manière modulaire une chambre à vide servant au revêtement d'objets (10), dans laquelle un procédé de dépôt physique en phase vapeur peut être exécuté, de cathodes. A cet effet, le dispositif selon l'invention comprend une multitude de dispositifs de réception dans lesquels peuvent être logées respectivement plusieurs cathodes. Un premier dispositif de réception (30) pour la réception d'une ou de plusieurs cathodes (40, 42, 44, 46) est placé pratiquement au centre de la chambre à vide (20) et deux autres dispositifs de réception (32, 34) pour la réception d'au moins une autre cathode respectivement (48, 50, 52, 54) sont placés au bord de la chambre à vide (20), à la manière de portes.
(DE) Um eine Vakuumkammer zum Beschichten von Gegenständen (10), in der ein physikalisches Abscheideverfahren (PVD) durchgeführt werden kann, modular mit Kathoden bestücken zu können, wird vorgeschlagen, eine Vielzahl von Aufnahmeeinrichtungen vorzusehen, in die jeweils mehrere Kathoden angeordnet werden können. Eine erste Aufnahmeeinrichtung (30) zur Aufnahme von einer oder mehrerer Kathoden (40, 42, 44, 46) ist im wesentlichen in der Mitte der Vakuumkammer (20) und zwei weitere Aufnahmeeinrichtungen (32, 34) zur Aufnahme von zumindest jeweils einer Kathode (48, 50, 52, 54) sind türartig am Rand der Vakuumkammer (20) vorgesehen.
front page image
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)