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Machine translation
1. (WO2005036607) SYSTEM AND METHOD FOR FEEDFORWARD CONTROL IN THIN FILM COATING PROCESSES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/036607    International Application No.:    PCT/US2004/033389
Publication Date: 21.04.2005 International Filing Date: 08.10.2004
Chapter 2 Demand Filed:    08.08.2005    
IPC:
C23C 14/34 (2006.01), C23C 14/35 (2006.01)
Applicants: DEPOSITION SCIENCES, INC. [US/US]; 3300 Coffey Lane, Santa Rosa, CA 95403 (US) (For All Designated States Except US).
MARK, George [US/US]; (US) (For US Only).
EVAN, Craves [US/US]; (US) (For US Only)
Inventors: MARK, George; (US).
EVAN, Craves; (US)
Agent: ENGLISH, D., Joseph; Duane Morris LLP, 1667 K Street, N.W., Suite 700, Washington, DC 20006 (US)
Priority Data:
60/509,248 08.10.2003 US
Title (EN) SYSTEM AND METHOD FOR FEEDFORWARD CONTROL IN THIN FILM COATING PROCESSES
(FR) SYSTEME ET PROCEDE DE COMMANDE PREDICTIVE DANS DES PROCESSUS DE DEPOT DE REVETEMENT EN COUCHES MINCES
Abstract: front page image
(EN)A system and method for feedforward control in thin film coating processes. A standard PID feedback control system (102) that continuously monitors two or more process variables in a reactive sputtering process is combined with a feedforward control system (122) to improve system performance. The control system enables much faster stabilization of the reactive sputtering process during target start-up, and improves control of the process once a steady-state operating condition has been reached following target start-up.
(FR)L'invention concerne un système et un procédé de commande prédictive dans des processus de dépôt de revêtement en couches minces. Un système d'asservissement PID classique qui surveille en continu au moins deux variables de traitement dans un processus de pulvérisation réactive est combiné à un système de commande prédictive afin d'améliorer le rendement du système. Le système de commande permet une stabilisation plus rapide du processus de pulvérisation réactive lors du démarrage d'une cible et améliore la commande du processus une fois une condition de fonctionnement en régime permanent atteinte après le démarrage d'une cible.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)