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Machine translation
1. (WO2005035836) VOLUME MEASUREMENT APPARATUS AND METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/035836    International Application No.:    PCT/US2004/033483
Publication Date: 21.04.2005 International Filing Date: 08.10.2004
IPC:
C25D 17/00 (2006.01), C25D 21/12 (2006.01), C25D 21/14 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, CA 95054 (US) (For All Designated States Except US).
BALISKY, Todd, A. [US/US]; (US) (For US Only).
CAMERON, Donald, A. [US/US]; (US) (For US Only).
RABINOVICH, Yevgeniy [US/US]; (US) (For US Only)
Inventors: BALISKY, Todd, A.; (US).
CAMERON, Donald, A.; (US).
RABINOVICH, Yevgeniy; (US)
Agent: PATTERSON, B., Todd; Moser, Patterson & Sheridan, L.L.P., 3040 Post Oak Boulevard, Suite 1500, Houston, Texas 77056 (US)
Priority Data:
10/683,917 10.10.2003 US
Title (EN) VOLUME MEASUREMENT APPARATUS AND METHOD
(FR) APPAREIL ET PROCEDE DE MESURE DE VOLUME
Abstract: front page image
(EN)Embodiments of the invention generally provide an electrochemical processing system configured to provide selected amounts of electrolyte composition components for plating processes. The selected amounts of components to be added to an electrolyte composition may be achieved by a volume measurement device (312) using an ultrasonic sensor (620) to measure volume levels of components in a vessel.
(FR)Des modes de réalisation de cette invention concernent d'une manière générale un système de traitement électrochimique conçu pour fournir des quantités définies de composants de compositions électrolytiques utilisés dans des processus de métallisation. Les quantités définies de composants à ajouter à une composition électrolytique peuvent être obtenues à l'aide d'un dispositif de mesure de volume (312) qui utilise un capteur ultrasonique (620) pour mesurer les niveaux de volumes de composants dans un récipient.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)