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Machine translation
1. (WO2005032763) A METHOD AND SYSTEM FOR CONTROLLING THE CHEMICAL MECHANICAL POLISHING BY USING A SENSOR SIGNAL OF A PAD CONDITIONER
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/032763    International Application No.:    PCT/US2004/030410
Publication Date: 14.04.2005 International Filing Date: 17.09.2004
IPC:
B24B 37/04 (2012.01), B24B 7/04 (2006.01)
Applicants: ADVANCED MICRO DEVICES, INC. [US/US]; One AMD Place, Mail Stop 68, Sunnyvale, CA 94088-3453 (US) (For All Designated States Except US).
MARXSEN, Gerd [DE/DE]; (DE) (For US Only).
KRAMER, Jens [DE/DE]; (DE) (For US Only).
STOECKGEN, Uwe, Gunter [DE/DE]; (DE) (For US Only)
Inventors: MARXSEN, Gerd; (DE).
KRAMER, Jens; (DE).
STOECKGEN, Uwe, Gunter; (DE)
Agent: DRAKE, Paul, S.; Advanced Micro Devices, Inc., 5204 East Ben White Boulevard, Mail Stop 562, Austin, TX 78741 (US)
Priority Data:
103 45 381.4 30.09.2003 DE
10/859,336 02.06.2004 US
Title (EN) A METHOD AND SYSTEM FOR CONTROLLING THE CHEMICAL MECHANICAL POLISHING BY USING A SENSOR SIGNAL OF A PAD CONDITIONER
(FR) PROCEDE ET SYSTEME DE COMMANDE DE POLISSAGE ELECTROCHIMIQUE AU MOYEN D'UN SIGNAL DE DETECTION D'UN CONDITIONNEUR DE TAMPON
Abstract: front page image
(EN)In a system and a method, according to the present invention, a sensor signal, such as a motor current signal, from a drive assembly of a pad conditioning system is used to control a CMP system to compensate for a change in the conditions of consumables, thereby enhancing process stability.
(FR)L'invention concerne un système et un procédé selon lesquels un signal de détection, de type signal de courant de moteur provenant d'un ensemble d'entraînement d'un système de conditionnement de tampon sert à commander un système de polissage électrochimique afin de compenser un changement relatif à des états de consommables, ce qui permet d'améliorer la stabilité de processus.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)