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1. (WO2005031886) PIEZOELECTRIC ELEMENT, INK-JET HEAD WITH SAME, AND THEIR MANUFACTURING METHODS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/031886    International Application No.:    PCT/JP2004/014460
Publication Date: 07.04.2005 International Filing Date: 24.09.2004
IPC:
B41J 2/045 (2006.01), B41J 2/055 (2006.01), B41J 2/135 (2006.01), B41J 2/14 (2006.01), B41J 2/16 (2006.01), H01L 41/04 (2006.01), H01L 41/09 (2006.01), H01L 41/18 (2006.01), H01L 41/187 (2006.01), H01L 41/22 (2013.01), H01L 41/29 (2013.01), H02N 2/00 (2006.01)
Applicants: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. [JP/JP]; 1006, Oaza Kadoma, Kadoma-shi Osaka 5718501 (JP) (For All Designated States Except US).
NAKAGAWA, Tohru; (For US Only).
TORII, Hideo; (For US Only)
Inventors: NAKAGAWA, Tohru; .
TORII, Hideo;
Agent: MAEDA, Hiroshi; Osaka-Marubeni Bldg. 5-7, Hommachi 2-chome Chuo-ku, Osaka-shi Osaka 5410053 (JP)
Priority Data:
2003-333779 25.09.2003 JP
Title (EN) PIEZOELECTRIC ELEMENT, INK-JET HEAD WITH SAME, AND THEIR MANUFACTURING METHODS
(FR) ELEMENT PIEZOELECTRIQUE, TETE JET D'ENCRE POURVUE DUDIT ELEMENT, ET LEURS PROCEDES DE FABRICATION
(JA) 圧電素子及びそれを備えたインクジェットヘッド並びにそれらの製造方法
Abstract: front page image
(EN)A piezoelectric element (1) has a multilayer structure in which a lower electrode (2), a piezoelectric film (3), and an upper electrode (4) are formed in order of mention. The surface of the upper electrode (4) is subjected to a processing of exposure to a zirconium compound (6).
(FR)L'invention concerne un élément piézo-électrique (1) possédant une structure multicouches, dans laquelle une électrode inférieure (2), un film piézo-électrique (3) et une électrode supérieure (4) sont formés dans l'ordre mentionné. La surface de ladite électrode supérieure (4) est soumise à un traitement par exposition d'un composé de zirconium (6).
(JA)圧電素子1は、下部電極2と圧電体膜3と上部電極4とがその順に積層されて構成されている。この圧電素子1の上部電極4の表面に対して、ジルコニウム化合物6に曝す処理を施している。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)