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1. (WO2005010956) ENDEFFECTORS FOR HANDLING SEMICONDUCTOR WAFERS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2005/010956 International Application No.: PCT/US2004/008767
Publication Date: 03.02.2005 International Filing Date: 23.03.2004
IPC:
H01L 21/687 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
687
using mechanical means, e.g. chucks, clamps or pinches
Applicants: MANTZ, Paul[DE/DE]; DE (UsOnly)
MATTSON TECHNOLOGY, INC.[US/US]; 47131 Bayside Parkway Fremont, California 94538, US (AllExceptUS)
Inventors: MANTZ, Paul; DE
Agent: DORITY & MANNING, P.A.; One Liberty Square 55 Beattie Place, Suite 1600 P.O. Box 1449 Greenville, South Carolina 29602, US
Priority Data:
10/781,32318.02.2004US
60/483,42527.06.2003US
Title (EN) ENDEFFECTORS FOR HANDLING SEMICONDUCTOR WAFERS
(FR) ORGANES PREHENSEURS POUR LA MANIPULATION DE TRANCHES DE SEMI-CONDUCTEUR
Abstract:
(EN) Various endeffector designs are disclosed for handling semiconductor wafers. For instance, an endeffector for handling wafers at a relatively low temperature is disclosed along with an endeffector for handling wafers at a relatively high temperature. Both endeffectors include uniquely designed support members that are configured to only contact a wafer at the wafer's edge. The endeffectors may also include a wafer detection system. The endeffector for handling wafers at relatively low temperatures may also include a pushing device that is used not only to position a wafer but to hold a wafer on the endeffector during acceleration or deceleration of the endeffector caused by a robot arm attached to the endeffector. As designed, the endeffectors may have a very slim profile making the endeffectors easily maneuverable.
(FR) L'invention concerne diverses conceptions d'organes préhenseurs pour la manipulation de tranches de semi-conducteur tels que, par exemple, un organe préhenseur permettant de manipuler des tranches à une température relativement basse, et un organe préhenseur permettant de manipuler des tranches à une température relativement élevée. Ces organes préhenseurs comprennent des éléments supports de conception unique qui n'entrent en contact avec la tranche que par le bord de celle-ci. Les organes préhenseurs peuvent aussi comprendre un système de détection de tranche. L'organe préhenseur permettant de manipuler des tranches à température relativement basse peut aussi comprendre un dispositif poussoir servant non seulement à positionner une tranche, mais aussi à la retenir sur l'organe préhenseur pendant l'accélération ou la décélération de celui-ci, produite par un bras robotisé fixé à cet organe. Ces organes effecteurs peuvent présenter un profil très mince qui rend leur manoeuvre aisée.
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Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (EPO) (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)