WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2005010227) CHEMICAL VAPOR DEPOSITION REACTOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2005/010227    International Application No.:    PCT/US2004/021001
Publication Date: 03.02.2005 International Filing Date: 29.06.2004
IPC:
C30B 25/14 (2006.01), C30B 29/40 (2006.01)
Applicants: ELITE OPTOELECTRONICS, INC. [US/US]; 18042 Courtney Court,, City of Industry, CA 91748 (US) (For All Designated States Except US).
LIU, Heng [US/US]; (US) (For US Only)
Inventors: LIU, Heng; (US)
Agent: CARTE, Norman, E.; MacPherson Kwok Chen & Heid LLP, 1762 Technology Drive, Suite 226, San Jose, CA 95110 (US)
Priority Data:
10/621,049 15.07.2003 US
Title (EN) CHEMICAL VAPOR DEPOSITION REACTOR
(FR) REACTEUR DE DEPOT CHIMIQUE EN PHASE VAPEUR
Abstract: front page image
(EN)A chemical vapor deposition reactor has a rotatable wafer carrier which cooperates with a chamber of the reactor to facilitate laminar flow of reaction gas within the chamber. The chemical vapor deposition reactor can be used in the fabrication of LEDs and the like.
(FR)L invention concerne un réacteur de dépôt chimique en phase vapeur présentant un support de plaquette rotatif en coopération avec un compartiment du réacteur pour faciliter l'écoulement laminaire du gaz de réaction à l'intérieur du compartiment. Ce réacteur de dépôt chimique en phase vapeur peut être utilisé dans la fabrication de DEL et analogue.
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)