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1. WO2004109374 - METHOD FOR TESTING ARRAY SUBSTRATE AND APPARATUS FOR TESTING ARRAY SUBSTRATE

Publication Number WO/2004/109374
Publication Date 16.12.2004
International Application No. PCT/JP2004/007984
International Filing Date 02.06.2004
IPC
G01N 23/225 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/-G01N17/178
22by measuring secondary emission from the material
225using electron or ion microprobes
G02F 1/13 2006.1
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
13based on liquid crystals, e.g. single liquid crystal display cells
G09G 3/00 2006.1
GPHYSICS
09EDUCATING; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
3Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
CPC
G01N 23/2251
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
22by measuring secondary emission from the material
225using electron or ion
2251using incident electron beams, e.g. scanning electron microscopy [SEM]
G02F 1/13
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
G02F 1/1309
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
1306Details
1309Repairing; Testing
G02F 1/1345
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
1333Constructional arrangements; ; Manufacturing methods
1345Conductors connecting electrodes to cell terminals
G09G 3/006
GPHYSICS
09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
3Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
006Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
Applicants
  • 東芝松下ディスプレイテクノロジー株式会社 TOSHIBA MATSUSHITA DISPLAY TECHNOLOGY CO., LTD. [JP]/[JP] (AllExceptUS)
  • 富田 暁 TOMITA, Satoru [JP]/[JP] (UsOnly)
Inventors
  • 富田 暁 TOMITA, Satoru
Agents
  • 鈴江 武彦 SUZUYE, Takehiko
Priority Data
2003-15943504.06.2003JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) METHOD FOR TESTING ARRAY SUBSTRATE AND APPARATUS FOR TESTING ARRAY SUBSTRATE
(FR) PROCEDE DE VERIFICATION D'UN SUBSTRAT EN RESEAU, ET APPAREIL DE VERIFICATION D'UN SUBSTRAT EN RESEAU
(JA) アレイ基板の検査方法およびアレイ基板の検査装置
Abstract
(EN) A method and an apparatus for testing an array substrate that is a component of a liquid crystal display panel. The method and apparatus realize shortening of the test times and also realize reduction of the equipments. In the method and apparatus, while the array substrate is placed in a tester chamber, an electric signal is supplied to a driver circuit part including at least one of a scan line driver circuit and a signal line driver circuit (S1). The electric signal having flowed through that driver circuit part is detected, thereby testing that driver circuit part (S2). An electron beam is irradiated to a pixel electrode that has been charged, and information of secondary electrons discharged from the pixel electrode is used to perform the test as to the pixel electrode (S5).
(FR) L'invention concerne un procédé et un appareil permettant de vérifier un substrat en réseau faisant partie d'un écran d'affichage à cristaux liquides. Ce procédé et cet appareil permettent de réduire les durées de vérification ainsi que les équipements nécessaires aux vérifications. Selon l'invention, le substrat en réseau est placé dans une chambre de vérification, et un signal électrique est fourni à une partie circuit d'attaque qui comprend au moins un circuit d'attaque à ligne de balayage ainsi qu'un circuit d'attaque à ligne de signal (S1). Le signal électrique circulant dans la partie circuit d'attaque est détecté, ce qui permet de vérifier la partie circuit d'attaque (S2). Un faisceau d'électrons est dirigé sur une électrode de pixel qui a été chargée, et des informations relatives à des électrons secondaires qui sont déchargés de l'électrode de pixel sont utilisées pour vérifier l'électrode de pixel (S5).
(JA) not available
Latest bibliographic data on file with the International Bureau