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Machine translation
1. (WO2004100142) IMPRINT DEVICE AND IMPRINT METHOD
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2004/100142    International Application No.:    PCT/JP2004/006217
Publication Date: 18.11.2004 International Filing Date: 28.04.2004
IPC:
B29C 33/50 (2006.01), B29C 37/00 (2006.01), B29C 59/02 (2006.01), G11B 7/26 (2006.01)
Applicants: TDK CORPORATION [JP/JP]; 1-13-1, Nihonbashi, Chuo-ku, Tokyo 1038272 (JP) (For All Designated States Except US).
TAKAI, Mitsuru [JP/JP]; (JP) (For US Only).
HATTORI, Kazuhiro [JP/JP]; (JP) (For US Only).
FUJITA, Minoru [JP/JP]; (JP) (For US Only)
Inventors: TAKAI, Mitsuru; (JP).
HATTORI, Kazuhiro; (JP).
FUJITA, Minoru; (JP)
Agent: SAKAI, Shinji; 3873-1, Higashiterao, Matsushiro-machi, Nagano-shi, Nagano 3811225 (JP)
Priority Data:
2003-131661 09.05.2003 JP
Title (EN) IMPRINT DEVICE AND IMPRINT METHOD
(FR) DISPOSITIF ET PROCEDE D'ESTAMPAGE
(JA) インプリント装置およびインプリント方法
Abstract: front page image
(EN)An imprint device according to the invention is arranged such that a stamper (61) formed with raised and recessed portions on one surface thereof and having flexibility is peelable from a resist layer (52) on a disk-like base material (51) upon completion of transcription of the shape of raised and recessed portions effected by pressing the raised and recessed portions of the stamper (61) against the resist layer (52), the imprint device comprising a sucking means (a sucking section (4), an air pump (5) and a squeezing mechanism (6)) arranged to suck a predetermined portion of the other surface of the stamper (61) to thereby peel this portion from the resist layer (52), wherein the peel completion range of the stamper (61) can be gradually enlarged starting from the state in which a portion of the stamper (61) has been peeled by the sucking means.
(FR)L'invention porte sur un dispositif d'estampage utilisant une matrice (61) souple, dont la surface est en creux et en bosses, qui peut être extraite d'une couche de réserve (52) disposée sur un matériau de base (51) en forme de disque suite à l'estampage de la matrice dans la couche de réserve (52). Le dispositif d'estampage comporte un moyen de succion (une section d'aspiration (4) + une pompe à air (5) + un mécanisme de compression (6)) conçu pour aspirer une partie prédéterminée de l'autre surface de la matrice (61) pour l'extraire de la couche de réserve (52). La plage d'extraction de la matrice (61) peut être graduellement élargie en partant de l'état où une partie de la matrice à été extraite par le moyen de succion.
(JA)この発明に係るインプリント装置は、その一面に凹凸部が形成されると共に可撓性を有するスタンパー(61)の凹凸部をディスク状基材(51)上のレジスト層(52)に押し付けることによるその凹凸形状の転写が完了した状態のレジスト層(52)からスタンパー(61)を剥離可能に構成され、スタンパー(61)の他面における所定の一部分を吸引することによって一部分をレジスト層(52)から剥離可能に構成された吸引手段(吸引部(4)、エアポンプ(5)および絞り機構(6))を備えて、スタンパー(61)の一部分を吸引手段によって剥離させた状態からスタンパー(61)の剥離完了範囲を徐々に拡大可能に構成されている。
Designated States: AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BW, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NA, NI, NO, NZ, OM, PG, PH, PL, PT, RO, RU, SC, SD, SE, SG, SK, SL, SY, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, YU, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)